Learn How to Model MEMS Devices, Upcoming Webinar

Fanny Littmarck | October 21, 2013

Microelectromechanical systems, also referred to as MEMS, involve very small devices, such as actuators, sensors, and resonators for instance. Inherent to the design of these devices is the coupling of many physics. Therefore, if you are an engineer who designs MEMS devices, you are likely familiar with multiphysics simulation software. If not, you can learn how to model these devices in our upcoming free webinar.

Model of a MEMS device: A prestressed micromirror
Model of a prestressed micromirror.

About Microelectromechanical Systems (MEMS)

The micromirror you see above is a type of MEMS device that is used in audiovisual applications for light reflection and redirection. What makes this particular model “MEMS”? Well, size-wise it’s within the qualifying range of 0.001 to 0.1 mm. In terms of the physics, it involves mechanical (the cantilever beams) and electrical (it’s electrostatically controlled) applications. The micromirror is made of metal, which is one of the materials used for MEMS devices – others include silicon, polymers, and ceramics. This is just one of many examples of MEMS devices, as you will learn on October 24th, when my colleague Supratik Datta holds a webinar on “Multiphysics Modeling of MEMS Devices”.

What You Will Learn During the Webinar on Modeling MEMS Devices

Before digging deeper into the topic of MEMS devices, Supratik will give you an overview of multiphysics simulations in a more general sense. This quick intro will touch on why anyone would want to turn to simulations in the first place, as well as show you the COMSOL environment at a glance. Next, he will walk you through what MEMS is, where it’s used in industry and applications, and what some of the design challenges are.

We won’t leave off there, of course. As with all of our webinars, there will be a live demo to show you how to face these challenges — this time using the Electrostatically Actuated Cantilever model. The focus will be on thermal, piezoresistive, piezoelectric, and electrostatic technologies. These are all great examples of multiphysics, as you will see in the webinar.

Register for the Free Online Event

The “Multiphysics Modeling of MEMS Devices” webinar will be held on October 24th and is a free online event, but you will need to register before tuning in. Don’t forget to bring your questions for the 15-minute Q&A session at the end of the presentation!

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