Deposition rate using particle tracing module

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Md Rokibul  Islam

Md Rokibul Islam

October 15, 2012 7:39am UTC

Deposition rate using particle tracing module

Hi
I have modeled a reactor using the "fluid flow" and "particle tracing module". A substrate wafer is placed across the flow channel. I have implemented the boundary condition so that whenever a particle hits the wafer, it get stick/freeze with the wafer wall.
Now, If I want to calculate how many particles are stick with the wafer wall and rate of deposition from the result section, how I am supposed to do that?

Thank you.
Rokib

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Sanket Kelkar

Sanket Kelkar

July 23, 2013 4:32pm UTC in response to Md Rokibul Islam

Re: Deposition rate using particle tracing module

Hi Rokibul,
Did you find the answer to your question. I am thinking of modeling my chemical vapor deposition process on similar lines.

Thank you,
Sanket

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