June 26, 2013 12:11am UTC
Does anyone know how to simulation contact force in COMSOL 4.3a MEMS module? I am trying to simulate a electrostatic actuated MEMS beam which will make a contact with contact electrode when actuated. Is there any way to calculated the contact force between the beam and contact electrode? I could do a similar simulation in Coventor, but highly doubted the results. Not sure if there is any way to do in COMSOL?
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