L1 100[um] Length of electrode L2 50[um] Length of outlet region L3 30[um] Length of inlet region h1 10[um] Photoresist film thickness h2 40[um] Flow inlet/outlet thickness rho 1.1e3[kg/m^3] Liquid density nu 1.394e-6[m^2/s] Kinematic viscosity mu nu*rho Dynamic viscosity h_Pe 10[um] Distance from surface for the velocity in Peclet number Pe 41.6 Peclet number D 4.5e-10[m^2/s] Diffusion coefficient c_bulk 0.6[mol/m^3] Bulk concentration u_bulk h2/h_Pe*Pe*D/(h1) Bulk velocity