E1 155[GPa] Young's modulus
nu1 0.23 Poisson's ratio
rho1 2330[kg/m^3] Density
sigma 50[MPa] Residual stress
epsilon sigma*(1-nu1)/E1 Residual strain
T1 605[degC] Deposition temperature
T0 25[degC] Room temperature
daT epsilon/(T1-T0) Coefficient of thermal expansion
thickness 2.25[um] Thickness
b 2[um] Width
L_straight 200[um] Length of straight cantilever
Length_plate 250[um] Length of resonator plate
Width_plate 120[um] Width of resonator plate
m Length_plate*Width_plate*thickness*rho1 Mass of plate
f0_straight_unstressed (1/(2*pi))*sqrt(((4*E1*thickness*b^3)/(m*L_straight^3))) Resonant frequency of straight unstressed cantilever
f0_straight_stressed (1/(2*pi))*sqrt(((4*E1*thickness*b^3)/(m*L_straight^3))+((24*sigma*thickness*b)/(5*m*L_straight))) Resonant frequency of straight stressed cantilever
L1 170[um] Length of first part of folded cantilever
L2 10[um] Length of second part of folded cantilever
L3 146[um] Length of third part of folded cantilever
L_folded_equiv (L1^3+0.25*(L2*thickness^2)+L3^3)^(1/3) Equivalent length of folded cantilever
f0_folded_unstressed (1/(2*pi))*sqrt(((4*E1*thickness*b^3)/(m*L_folded_equiv^3))) Resonant frequency of folded unstressed cantilever