Models
Induction Heating
Similar to Joule heating, induction heating provides one further important modification. The currents that heat the material are induced by means of electromagnetic induction. This means that no physical contact is required between work piece and induction coil, making this process suitable for processes where a high degree of cleanness is required, such as in semiconductor manufacturing. Induction heating can also improve efficiency by avoiding heat losses from the surfaces that would provide the electrical connection.
Modeling induction heating requires coupling two different fields of physics:
electromagnetism and heat transfer. Some material
properties can depend on heat, necessitating a two-way coupling of
these physical phenomena.
Hot Wall Furnace for Semiconductor Processing
The animation shows how the temperature varies with time in a hot wall furnace heated by induction coils. A good design concentrates heat inside the susceptor while maintaining the surrounding tube at a moderate temperature.
