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Multiphysics Simulations for the Design of Probe-Heads Micro-Needles


A. Corigliano1 A. Courard1 G. Cocchetti1 P. Gagliardi1 L. Magagnin1 R. Vallauri2 D. Acconcia2
1Politecnico di Milano, Milano, Italy
2Technoprobe, Cernusco Lombardone, Italy


Electro-thermal simulation of probe-head micro needles.

The paper presents recent results concerning the experimental mechanical characterization, the numerical modeling and the design of micro-needles used in the construction of probe heads for wafer testing. A fully coupled electro-thermal model was created using COMSOL and combined to a research-oriented thermo-mechanical Finite Element (FE) code in order to accurately reproduce the micro-needle behavior under constant load and varying current intensity. The numerical simulations put in evidence the influence of the presence of a set of micro-needles on the temperature distribution.

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