Accurate geometry factor estimation for the four point probe method using COMSOL Multiphysics

Kalavagunta, A., Weller, R.A.
Vanderbilt University, Nashville, TN

The four-point probe is a tool for measuring the resistivity of a material by contact with its surface. The tool is widely used in the semiconductor industry and has applications both in research and manufacturing. The method though is quite sensitive to various paramaters like the substrate material, probe separation, probe depth etc. In this paper we show that COMSOL multiphysics can be used quite effectively to get a numerical estimate of the geometry factor.