Development of Surface Micromachinable Capacitive Accelerometer using Fringe Electrical Field

S. Aoyagi1, and Y.-C. Tai2
1Robot & Microsystem Laboratory, Kansai University, Osaka, Japan
2Caltech Micromachining Laboratory, California Institute of Technology, Pasadena, USA

A new type of accelerometer is demonstrated which consists of a dielectric seismic mass and a comb-shaped planar capacitor underneath it. The simple structure of the device allows the use of polymer Parylene as the proof mass, so the technology is greatly simplified and only surface micromachining is required.

The measuring principle is detecting capacitance change according to the dielectric mass movement in the fringe electrical field. This principle is verified by FEM simulation.