Electrohydrodynamic Micropump Modeling for Performance Optimization

A. Mulye[1], S. Potnis[2]
[1]Northeastern University, Boston, MA, USA
[2]VIT, Mumbai, Maharashtra, India

We present an optimized and efficient design of an electrohydrodynamic (EHD) micropump for high performance in microscale and biological applications. We are targeting two major applications, a parylene C design for electrically-actuated medicine delivery, and a silicon-based pump design for on-chip cooling of microprocessors and SOCs. The EHD micropump works on the movement of microscale particles and fluids through the presence of an electromagnetic field. It is found that the performance and operation of the pump are highly sensitive to changes in voltage, material, and the positioning of electrodes. We are carrying out tests on the micropump, modeled in COMSOL Multiphysics®, to study the effects on pump temperature, magnetic properties, and particle acceleration, due to changes in voltage, resistivity, and geometrical parameters and electrical parameters.