Finite Element Analysis of Electro-mechanical Deflection of Cantilevers for SPM and MEMS Applications

D. Moro, and G. Valdrè
University of Bologna

The understanding of the distribution of electrostatic forces at the nanoscale is of fundamental importance for the development of nanotechnology.

In this work, in order to quantify the EFM cantilever/tip-sample interaction, we present a 3D static Finite Element Analysis of the electromechanical interaction between conductive probes and samples, using COMSOL Multiphysics.

The simulation was then compared with experimental data obtained in an EFM.