Flexible MEMS Actuated Display System and Modeling Optimization

G. Tortissier[1], C.-Y. Lo[2], H. Fujita[1], and H. Toshiyoshi[1,3]
[1]LIMMS/CNRS-IIS(UMI-2820), Institute of Industrial Science, The University of Tokyo, Tokyo, Japan
[2]Institute of NanoEngineering and MicroSystems, National Tsing Hua University, Taiwan
[3]Research Center for Advanced Science and Technology, The University of Tokyo, Tokyo, Japan

Previous works on MEMS actuated Fabry-Perot interferometer (FPI) highlighted promising results for flexible display applications. Three primary color pixels have indeed been obtained using both photolithography and Roll-to-Roll printing process with satisfying color purity and transmittance. However both of these processes are expensive and time-consuming for preparing micropatterns. For these reasons, a new process based on inkjet printing has been set up. It contributes in a more ecological-friendly, high reproducible and fast process development while targeting improved features. In addition, the FPI structure will be optimized using COMSOL Multiphysics software to decrease the actuation voltage.