Flexible MEMS Actuated Display System and Modeling OptimizationG. Tortissier, C.-Y. Lo, H. Fujita, and H. Toshiyoshi[1,3]
LIMMS/CNRS-IIS(UMI-2820), Institute of Industrial Science, The University of Tokyo, Tokyo, Japan
Institute of NanoEngineering and MicroSystems, National Tsing Hua University, Taiwan
Research Center for Advanced Science and Technology, The University of Tokyo, Tokyo, Japan
Previous works on MEMS actuated Fabry-Perot interferometer (FPI) highlighted promising results for flexible display applications. Three primary color pixels have indeed been obtained using both photolithography and Roll-to-Roll printing process with satisfying color purity and transmittance. However both of these processes are expensive and time-consuming for preparing micropatterns. For these reasons, a new process based on inkjet printing has been set up. It contributes in a more ecological-friendly, high reproducible and fast process development while targeting improved features. In addition, the FPI structure will be optimized using COMSOL Multiphysics software to decrease the actuation voltage.