Fluid-structure Interaction Modeling of Air Bearing

H.R. Javani[1], P. Kagan[2], F. Huizinga[1]
[1]ASML - MDev – Mechanical analysis, Veldhoven, The Netherlands
[2]ASML - MDev – System Dynamics, Veldhoven, The Netherlands

Air bearings are special type of bearings which provide nearly zero friction between two surfaces. This is achieved by a compressed layer of gas between the surfaces. This study presents a modeling technique for an Air bearing component.

COMSOL Multiphysics® is used to efficiently solve a coupled Fluid-Structure Interaction analysis. Computational time is significantly reduced compared to other solution technologies like segregated method. Additionally the model is set up quite easily and the expected physic is captured adequately.