Increasing the Robustness of a Linear Transduction Pressure Sensor for Post-Processing Assembly

A. Dhawan[1], F. Li[1], A.G. Akingba[2], and J.V. Clark[1]

[1]Purdue University, West Lafayette, IN, USA
[2]Indiana University, Indianapolis, IN, USA

In this paper we numerically explore design variations to increase the resistance to rotation of our novel large-deflection, linear-transduction pressure sensor to increase its expected yield for post-processing assembly and misalignment. During post processing assembly, a diaphragm is anodically bonded to the base which contains comb drives. Once the diaphragm is in contact with the comb drive, a slight unintentional rotation might close and short circuit the comb drive gap. By increasing the resistance to rotation, the comb drive gaps will be less likely to close during post-processing assembly and misalignment. The current design of our unique pressure sensor consists of a fixed-fixed flexure that supports a large array of comb drive fingers, with gaps that are sensitive to support rotation. The designs presented here work to increase torsional stiffness, while maintaining most of performance attributes of the previous design. Our analysis examines maximal rotation due to dry torsional friction and misalignment as a function of various design geometries and design tradeoffs.

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