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MEMS Resonator for RF Applications

V. Harshey
Visvesvaraya National Institute of Technology
Maharashtra, India

Vibrating mechanical tank components, such as quartz crystals and surface acoustic wave (SAW) resonators with Q’s in the range of 10e3–10e6, are widely used to implement high-Q oscillators and band pass filters in the radio frequency (RF) and intermediate frequency (IF) stages of communication transceivers. This paper will discuss designing of resonator and effects of various parameter on the resonator behavior.

COMSOL was used to determine pullin voltage, eigen frequencies and some thermal parameters.