Modeling and Simulation of Circular and Square Diaphragm Absolute Micro Pressure Sensors using COMSOL

M. Sundaram[1], A. Simha[2], S M. Kulkarni[3], and S. Bhat[4]
[1]Department of ICE, Manipal Institute of Technology, Manipal, India
[2]Department of Mechatronics, National Institute of Technology, Suratkal, India
[3]Department of Mechanical, National Institute of Technology, Suratkal, India
[4]Department of E&C, Manipal Institute of Technology, Manipal, India

The aim of this paper is to model and simulate a Circular and Square diaphragm absolute micro pressure sensors. With the applied pressure, the change in deflection and stress pattern of the diaphragm is analytically determined.

The structures are then simulated using COMSOL Multiphysics®. The results obtained from analytical equations are compared with simulated results. The range and sensitivity information are extracted from the analysis and the results are also presented. COMSOL Multiphysics® is used to simulate the micro structure and MATLAB® is used as a tool to carry out the range analysis.

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