Modeling of Low Pressure Magnetron Plasma Discharge

F. Jimenez, S. D. Ekpe, and S. K. Dew
Department of Electrical and Computer Engineering, University of Alberta, Edmonton, AB, USA

The plasma characteristics of a low pressure plasma discharge are dependent on the process conditions in a complicated manner. In order to understand this dependence, a comprehensive model, which takes into consideration the effects of the E x B field and gas heating on the transport of plasma particles, is required.

In this work, a Monte Carlo - fluid - Poisson hybrid model is used in describing the plasma discharge at low pressure typical for magnetron sputtering. The source term used in the fluid model is derived from a Monte Carlo code. The models are coupled to a gas heating module. Results compare well with experimentally measured data using a Langmuir probe.