Parylene Accelerometer Utilizing Spiral Beams

S. Aoyagi1, K. Makihira1, D. Yoshikawa1, and Y.-C. Tai2
1Robot & Microsystem Laboratory, Kansai University, Osaka, Japan
2Caltech Micromachining Laboratory, California Institute of Technology, Pasadena, USA

This paper reports on a Parylene accelerometer utilizing spiral beams. Since Parylene has intrinsic tensile stress, the resonant frequency of the sensor structure is higher than under the case with no tensile stress.

Considering the sensitivity of the accelerometer, the investigation of a suspended structure supported by straight beams is carried out both theoretically and experimentally.

As a result, it is proven that comparatively long beams are necessary for realizing the high sensitivity of a Parylene sensor with tensile stress.