Simulation of Clamped-Free and Clamped-Clamped Microbeams Dynamics for Nonlinear Mechanical Switch Applications

M. Uncuer, B. Marinkovic, and H. Koser
Department of Electrical Engineering, Yale University, New Haven, CT, USA

This work focuses on the nonlinear dynamics of clamped-free and clamped-clamped microbeams under electrostatic and shock loading for microswitch applications. This type of analysis essentially requires the consideration of the well-known "pull-in" phenomenon under dynamic conditions.

In this work, we show that a micro switch that makes contact above a certain voltage but is otherwise immune to shock loads can be designed and simulated. The nonlinear partial differential equations governing the behavior of cantilever beams under electrostatic and shock loading, are solved using MATLAB SIMULINK.

The use of COMSOL Multiphysics enables to compare the results and include different geometries. The simulation results are also compared with other experimental results published elsewhere. Damping effects, such as squeeze film damping, are also taken into account.