Simulation of Surface Stress Effect on Mechanical Behaviour of Silicon Microcantilever

A. Ricci, E. Giuri, and C. Ricciardi
LATEMAR, Italy

Microcantilevers made of crystal silicon are probably the most diffused type of MEMS because of their simple fabrication and their vast applications.

In this presentation we treat the mechanical behaviour of silicon mirocantilevers, and also give an overview of the many application areas that these apply to.

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