Using Coupling Variables to Solve Compressible flow, Multiphase flow and Plasma Processing Problems

D. Smith
MKS Instruments

This presentation summarizes three different types of modeling using COMSOL Multiphysics. It is divided into three parts: Compressible flow, Multiphase flow, and Plasma Simulations.

For the first part, we perform a special case study of the Mass Flow Verifier. A Mass Flow Verifier validates the accuracy of a Mass Flow Controller by measuring the rate of change of pressure in a fixed volume. In our present work we have used COMSOL Multiphysics to simulate the effect of compressive heating within this Mass Flow Verifier.

This presentation also contains a thorough investigation of the coupling variables in COMSOL Multiphysics, and how they can be utilized in Fluid Dynamic Simulations within the COMSOL environment.

An important and interesting problem when you make use of coupling variables is in our thrid case study, plasma simulations. In this presentation we explain how to set up such simulations, using coupling variables.

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Keynote speaker's biography: Daniel Smith is a staff scientist at MKS Instruments in the Corporate Advanced Technology group. He has a Masters degree in applied mathematics from the University of St. Andrews in 2002 and a Masters in Numerical computing from the University of Manchester.

His main areas of expertise are viscous compressible flow, multiphase flow, computational electromagnetics and plasma simulations. At MKS Instruments, he has worked on a number of critical projects related to materials delivery and reactive gas generators. These include mass flow controllers and verifiers, pulsed vapor delivery systems for Atomic Layer Deposition applications and RF plasma systems.

Daniel Smith was one of the keynote speakers at the COMSOL User's Conference, fall 2006 in Boston.

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