M. Ramya, R. P. S. Valli, R. Vidya, G. Anju, and M. Alagappan
PSG College of Technology
Tamil Nadu, India
In this study, a biomimetic vibrating 3D MEMS Gyroscope is designed, consisting of two circular diaphragms with a club shaped structure placed over one of them. This MEMS based vibrating gyroscope was modeled and simulated using COMSOL Multiphysics 4.1 - MEMS module. The purpose of the research was to develop an effective gyroscope for guidance and control of mobile robots. The simulated ...
A Study of the Effects of Mounting Supports, and Dissipation on a Piezoelectric Quartz Double-Ended Tuning Fork Gyroscope
G. Choi, Y. Yong
Rutgers University, New Brunswick, NJ, USA
A COMSOL model of a piezoelectric quartz double ended tuning fork gyroscope was implemented. The gyroscope has two detection modes; the first mode detects the angular velocity about a z-axis perpendicular to the tuning fork plane (x-y plane), while the second mode detects the angular velocity about a y-axis that is the longitudinal axis along the length of the tuning fork. Eigenfrequency analyses ...
L. Sujatha, B. Preethi
Rajalakshmi Engineering College, Chennai, India
MEMS gyroscope technology provides cost- effective method for improving directional estimation and overall accuracy in the navigation systems. This paper presents a tuning- fork gyroscope (TFG)  with a perforated proof mass. The perforated proof mass used in the design enables the reduction of the damping effect. This MEMS based gyroscope was designed using COMSOL Multiphysics 4.2a. This ...
S. A. Selvin, N. B. Moorthy, G. Anju, and M. Alagappan
PSG College of Technology
Tamil Nadu, India
This paper chalks out the design and performance of a piezo resistive surface micro machined circular diaphragm based pressure sensor. A structural deformation in the piezo resistive nano structure placed above the diaphragm will result in varied current density, which is in direct accordance with the applied pressure. This effect relies on the principle of piezo resistivity and employing a nano ...
J. Strong, and C. Washburn
Sandia National Laboratories
The newly emerging field of carbon-based MEMS (C-MEMS) attempts to utilize the diverse properties of carbon to push the performance of MEMS devices beyond what is currently achievable. Our design employs a carbon-carbon composite using nano-materials to build a new class of MEMS accelerometer that is hyper-sensitive over a dynamic range from micro-G to hundreds of G’s – far surpassing the ...
Fluid-Structure Interaction Modeling for an Optimized Design of a Piezoelectric Energy Harvesting MEMS Generator
I. Kuehne, A. van der Linden, J. Seidel, M. Schreiter, L. Fromme, and A. Frey
Siemens AG, Corporate Research & Technologies, Munich, Germany
Comsol Multiphysics GmbH, Göttingen, Germany
This paper reports the design of a piezoelectric energy harvesting micro generator for an energy autonomous tire pressure monitoring wireless sensor node. For our design we use a piezoelectric MEMS generator approach without additional mass. The intrinsic mass of the cantilever is in the microgram region and the resulting acceleration forces are very small. The generator has a triangular ...
VLSI Layout Based Design Optimization of a Piezoresistive MEMS Pressure Sensors using COMSOL Multiphysics
R. Komaragiri, Sarath. S., N. Kattabomman
NIT Calicut, Kozhikode, Kerala
This paper focuses on the diaphragm design and optimization of a piezoresistive Micro Electro Mechanical System (MEMS) pressure sensor by considering Very Large Scale Integration (VLSI) layout schemes. The aim of these studies is to find an optimal diaphragm shape by Finite Element Method (FEM) using COMSOL®, which is most suitable for VLSI layout. Optimal diaphragm shape is a diaphragm shape ...
V. Vadde, and B. Lakshmi G
In this paper, we develop and analyze a standard piezoacoustic Tonpilz-transducer model for underwater acoustics in Comsol by addressing the attendant piezoelectric and pressure acoustic multiphysics phenomena. Transducer properties that are studied and characterized are the center frequency, bandwidth, linearity, sensitivity, and noise figure. In an effort to miniaturize the transducer, a ...
Strauss, D.J., Trenado, C.
Institute of New Materials, Saarbrücken
Mathematical modeling at the Institute of New Materials has played a crucial role in supporting the manufacturing and design of new technologies of nanomaterials, whose applications range from transportation, electronics and optics engineering to environmental sciences. In this paper, we focus our attention to two mathematical models together with their corresponding FEMLAB simulations: The ...
J. Crompton, S. Yushanov, L.T. Gritter, K.C. Koppenhoefer
AltaSim Technologies, Columbus, OH, USA
The resonance conditions for surface plasmons are influenced by the type and amount of material on a surface. Full insight into surface plasmon resonance requires quantum mechanics considerations. However, it can be also described in terms of classical electromagnetic theory by considering electromagnetic wave reflection, transmission, and absorption for the multi-layer medium. The two commonly ...