Charles Stark Draper Laboratory
Micromechanical resonators are used in a wide variety of applications, including inertial sensing, chemical and biological sensing, acoustic sensing, and microwave transceivers. Despite the distinct design requirements for each of these applications, a ubiquitous resonator performance parameter emerges. This is the resonator’s Quality factor (Q), which describes the mechanical energy damping. ...
S. Aoyagi1, and Y.-C. Tai2
1Robot & Microsystem Laboratory, Kansai University, Osaka, Japan
2Caltech Micromachining Laboratory, California Institute of Technology, Pasadena, USA
A new type of accelerometer is demonstrated which consists of a dielectric seismic mass and a comb-shaped planar capacitor underneath it. The simple structure of the device allows the use of polymer Parylene as the proof mass, so the technology is greatly simplified and only surface micromachining is required. The measuring principle is detecting capacitance change according to the dielectric ...
Electro-Thermal Modeling of High Power Light Emitting Diodes Based on Experimental Device Characterization
T. Lopez, and T. Margalith
Philips Research, Aachen, Germany
Philips Lumileds Lighting Company, San Jose, CA, USA
This paper presents a 3D finite element model in COMSOL for the electro-thermal analysis of high power light emitting diodes (LEDs). The proposed model and implementation approach require basic electrical and optical parameters that may be experimentally derived with the aid of advanced post-processing techniques. Extensive experimental validation reveals the capability of the model to accurately ...
S. Heß, R. Külls, and S. Nau
The Fraunhofer Ernst-Mach-Institute (EMI) developed a novel, high-g accelerometer, which is an undamped MEMS device, containing self-supporting piezoresistive elements. The main requirements for such a sensor are high sensitivity, high resonant frequency and a solid mechanical design. Due to the fact, that pure analytic analyses cannot cover all multi-physical aspects of such a complex device the ...
Optimization of Design Parameters of a Novel MEMS Strain Sensor used for Structural Health Monitoring of Highway Bridges
H. Saboonchi, and D. Ozevin
Civil Engineering Department
University of Illinois at Chicago
The novel Micro Electro Mechanical System (MEMS) based Piezoresistive stain sensor is presented in this paper. The main goal of this sensor is to monitor the localized strain in the highway bridges especially near the crack tips. Monitoring the crack growth on the bridges can lead to early detection and prevention of bridge failures. The COMSOL Multiphysics software was used to optimize the ...
N. Gouthami, D. Parthiban, M. Alagappan, and G. Anju
PSG College of Technology
Tamil Nadu, India
The objective of this paper is to design a 3D Gas Sensor for sensing Hydrogen gas and to increase the conductivity at nano level. In this novel design, nanorods act as the sensing layer. The sensitivity towards gas adsorption is found to be increased due to its high surface to volume ratio. The total displacement and voltage on intermediate layer after gas adsorption will be changing by varying ...
BITS Pilani K K BIRLA GOA CAMPUS
The actuator comprises of a temperature sensitive composite deflecting beam, a piezoelectric substrate and a field effect transistor. The temperature rise causes an expansion in the composite beam thereby causing it to deflect. The deflecting beam impinges on the piezoelectric crystal and generating voltage. Response curves for the deflection versus temperature for temperature ranges ...
T. Kaya, B. Shiari, K. Petsch, and D. Yates
Central Michigan University, School of Engineering and Technology, Mount Pleasant, MI
University of Michigan, Dept. of Electrical Engineering and Computer Science, Ann Arbor, MI
In this work, a MEMS low-g accelerometer with three sensitive directions is designed for health monitoring applications. The accelerometer may have different sensitivity in different axes. The proof-mass of the device is suspended by four serpentine springs, and the comb drive structure is used to form the differential capacitor to measure the displacement of the proof-mass. The structure has an ...
Haschke, T.1, Lautenschlager, D.1, Wiechert, W.1, Bonaccurso, E.2, Butt, H.J.2
1 University of Siegen, Faculty 11, Department of Simulation, Siegen, Germany
2 Max-Planck-Institute for Polymer Research, Polymer Physics Group, Mainz, Germany
The design of micro and nanoscale systems is a great challenge for modelling and simulation. In particular Lab-on-a-Chip-technology offers a wide spectrum of possible applications. Recently Bonaccurso and Butt (Bonaccurso & Butt 2005) presented a new approach to investigate droplet evaporation: They placed water droplets on rectangular, silicon atomic force microscope (AFM) cantilevers so that ...
Kaya, T., Koser, H.
This work focuses on the study of large amplitude, nonlinear deflection dynamics of a piezoelectric accelerometer and aims to determine the material and geometry limitations on the structural integrity of the device. FEMLAB’s multiphysics capabilities are used throughout this FEA study to understand the relationship of the geometry and materials to the resonance modes, large deflection ...