Technical Papers and Presentations

Here you will find presentations given at COMSOL Conferences around the globe. The presentations explore the innovative research and products designed by your peers using COMSOL Multiphysics. Research topics span a wide array of industries and application areas, including the electrical, mechanical, fluid, and chemical disciplines. Use the Quick Search to find presentations pertaining to your application area.

Design of MEMS Based High Sensitivity and Fast Response Capacitive Humidity Sensor

R. Karthick, S. P. K. Babu, A. R. Abirami, and S. Kalainila
Periyar Maniammai University
Periyar Nagar
Vallam, Thanjavur
Tamilnadu, India

This paper presents the design and simulation of high sensitivity and fast response capacitive humidity sensor. Generally, the capacitive humidity sensor is made up of parallel electrode, the upper electrode being a grid with various line width and line spacing. A model is simulated using COMSOL Multiphysics. High sensitivity and fast response of the model is optimized by varying the ...

Modeling and Analysis of Thermal Bimorph using COMSOL Multiphysics®

Rachita Shettar[1], Dr. B G. Sheparamatti[1]
[1]Basaveshwar Engineering College, Bagalkot, Karanataka, India

In this paper modeling and simulation results of a thermal bimorph is capable of producing increased displacement for increasing temperatures are presented. Thermal bimorphs are popular actuation technology in MEMS (Micro-Electro-Mechanical Systems). Bimorph actuators consist of two materials with different coefficients of thermal expansion. The main objective of this work is to investigate the ...

Simulation of a One-Port SAW Resonator using COMSOL Multiphysics

R. Krishnan, H.B. Nemade, and R. Paily
Indian Institute of Technology, Guwahati

In this paper, we discuss simulation of one-port Surface Acoustic Wave (SAW) resonators using COMSOL Multiphysics. Resonator action can be achieved in one of the two ways; a single Inter-digital Transducer (IDT) having several fingers over a piezoelectric substrate or a short IDT with reflecting gratings at the ends of the IDT. We have modeled a Rayleigh wave type SAW device choosing YZ ...

Parametric Study of Polyimide - Lead Zirconate Titanate Thin Film Cantilevers for Transducer Applications

A. Arevalo[1], I.G. Foulds[1]
[1]King Abdullah University of Science and Technology, Thuwal, Kingdom of Saudi Arabia

The simulation of the piezoelectric actuation of the micro-cantilever is presented. Lead Zirconate Titanate (PZT) was chosen for the device fabrication design, due to its thin film processing flexibility. Four layers compose the cantilever structures presented in this work: PZT (piezoelectric material), Platinum (electrodes) and Zirconium Oxide as the buffer layer for the PZT film and polyimide ...

Using COMSOL Multiphysics Capability for Engineering High Q MEMS Resonators

Amy Duwel
Charles Stark Draper Laboratory
Cambridge, USA

Micromechanical resonators are used in a wide variety of applications, including inertial sensing, chemical and biological sensing, acoustic sensing, and microwave transceivers. Despite the distinct design requirements for each of these applications, a ubiquitous resonator performance parameter emerges. This is the resonator’s Quality factor (Q), which describes the mechanical energy damping. ...

Design and Simulation of Valveless Piezoelectric Micropump

L. Nayana[1], P. Manohar[1], S. Babu[1]
[1]Department of Electrical Engineering, Visvesvaraya Technological University, Bangalore, Karnataka, India

In this paper some discrete parts of a valveless piezoelectric micropump for drug delivery system is designed and simulated. The core components of the micropump are actuator unit that converts the reciprocating movement of a diaphragm actuated by a piezoelectric actuator into a pumping effect and Nozzle/diffuser elements that are used to direct the flow from inlet to outlet. Simulations are ...

Modeling and Simulation of Dual Application Capacitive MEMS Sensor - new

A. Ravi[1], R. Krishna[1], J. Christen[1]
[1]Arizona State University, Tempe, AZ, USA

Capacitive MEMS sensors offer high spatial resolution, sensitivity and good frequency response. In this paper, we present a circular membrane capacitive MEMS device that finds use both as capacitive micromachined ultrasonic transducer (CMUT) and pressure sensor. The MEMS device is first designed and simulated to work as a CMUT operating at about 5 MHz frequency. The device can also function as a ...

Design and Simulation of 3D ZnO Nanowire Based Gas Sensors for Conductivity Studies

N. Gouthami, D. Parthiban, M. Alagappan, and G. Anju
PSG College of Technology
Coimbatore
Tamil Nadu, India

The objective of this paper is to design a 3D Gas Sensor for sensing Hydrogen gas and to increase the conductivity at nano level. In this novel design, nanorods act as the sensing layer. The sensitivity towards gas adsorption is found to be increased due to its high surface to volume ratio. The total displacement and voltage on intermediate layer after gas adsorption will be changing by varying ...

MEMS Acoustic Pixel - new

A. Arevalo[1], I. G. Foulds[2]
[1]King Abdullah University of Science and Technology, Thuwal, Saudi Arabia
[2]The University of British Columbia, Vancouver, BC, Canada

A COMSOL Multiphysics® simulation was used to simulate the behavior of a micro-membrane (Acoustic Pixel) to be used as a potential acoustic transducer. The MEMS and Piezoelectric devices interfaces were used to simulate such transducer. A four-cantilever spring configuration is initially proposed. Each cantilever has a width of 30 µm and are connected to a central circular plate with a radius ...

Degeneracy Breaking, Modal Symmetry and MEMS Biosensors

H.T.D. Grigg[1], T.H. Hanley[1], B.J. Gallacher[1]
[1]Newcastle University, Newcastle upon Tyne, United Kingdom

This work is concerned with systems possessing cyclic symmetries. In particular, we concentrate on the case in which the medium possesses infinite order cyclic symmetry, while the constitutive relations have cyclic symmetry of a lower order. We investigate the interactions between modes with cyclic symmetry of order n and geometries with underlying cyclic symmetry of order M. Rayleigh's ...

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