K. PraveenKumar, P. Suresh, K. Subash, M. Alagappan, A. Gupta
PSG College of Technology, Coimbatore, Tamil Nadu, India.
In this work, we present the performance analysis of novel micro machined Piezoresistive fluid flow pressure sensor using COMSOL Multiphysics. The principle of the sensing mechanism is based on the deflection of four sensing layers embedded on a thin membrane. The fluid passes through the layer causes the deflection of the sensing layer which measures the pressure of the fluid. The following ...
S. Takahashi, S. Ogata
Tokyo Metropolitan University Hachioji City, Tokyo, Japan
We studied the influence of a number of gas-liquid interface on the drag reduction effect by numeric simulation. Level set method was used for an analysis of gas-liquid interface. The analytic model is rectangular channel of height h = 5 micrometer and width w = 20 micrometer with two hydrophobic microstructures in bottom of channel. In this channel, we found that the liquid penetrates in the ...
M.H. Poech, M. Weiß, and K. Gruber
Fraunhofer Institute for Silicon Technology, Itzehoe, Germany
Since a couple of years, sintering becomes more and more important for power electronics. To press a semiconductor under high temperature in silver paste on a substrate promises benefits for durability. Tests with semiconductors of different thickness expose some problems. After the cool down, some of them fall slightly from the substrate. Stress in the boundary layer, caused by different ...
N. Al Cheikh, P. Xavier, J. Duchamp, and K. Schuster
Institute of Microelectronics, Electromagnetism and Photonics (IMEP-LAHC), Grenoble, France
Institute of Millimetrics Radio Astronomy (IRAM), Grenoble, France
Superconducting GHz electronics circuits are frequently used in Radio Astronomy instrumentation. The features of these instrumentations can be significantly improved by using tuneable capacitances, which can be realized by electrically actuated, micromechanical bridges (MEMS) made of superconducting Niobium (Nb). In order to analyze the electromechanical behavior of such devices and the intrinsic ...
3D Stationary and Temporal Electro-Thermal Simulations of Metal Oxide Gas Sensor Based on a High Temperature and Low Power Consumption Micro-Heater Structure
N. Dufour, C. Wartelle, P. Menini
LAAS-CNRS, Toulouse, France
Renault, Guyancourt, France
The aim of this work was to simulate the electro-thermal behavior of a micro-hotplate used as a gas sensor, in order to compare the obtained results with a real structure. The structure has been designed in 3D and a stationary and a temporal study has been realized.
J. Golebiowski, S. Milcarz
 Department of Semiconductor and Optoelectronics Devices, Technical University of Lodz, Lodz, Poland
The silicon cantilever with the planar coil was applied to the magnetic flux density measurements. The influence of shape and dimensions of planar coil on magnetic energy density was described. In cause of magnetic anisotropy of analyzed silicon structure FEM method and couple field method was applied in simulation. The Lorentz force based sensors owing to their potentially simpler fabrication ...
N. Badi, R. Mekala
Department of Physics, Center for Advanced Materials, University of Houston, Houston, TX, USA
Department of Electrical & Computer Engineering, University of Houston, Houston, TX, USA
Thermally conducting but electrically insulating materials are needed for heat-sink LED lighting applications. We report on a cost effective and innovative method based on creating core-shell nanoparticles in polymer with aluminum (Al) nanoparticles as the high thermal conductivity core and ultrathin aluminum oxide (Al?O?) as a capping shell. The solid oxide shell around the Al core prevents ...
V. S. Nagaraja, Ramanuja H. S., Deepak K, S. L. Pinjare
Electronics and Communication Engineering, Nitte Meenakshi Institute of Technology, Bangalore, Karnataka, India
In this work, a MEMS based condenser microphone [1,2] using Polyimide as the diaphragm has been designed. The microphone structure has a backplate placed on top of the diaphragm. The backplate and the diaphragm are made up of polyimide. The two polyimide plates are separated by air gap which is achieved by using Aluminium as a sacrificial layer in between, which is etched away to create the air ...
Multiphysics and Simulation of MEMS based Bolometer for Detecting the Radiations in Nuclear Power Plants
K. Umapathi, S. Swetha, K. Ranjitha, K. Vinodh, K. Deebiga, R. Harisudarsan
United Institute of Technology, Coimbatore, TamilNadu, India
Sri Krishna College of Engineering and Technology, Coimbatore, Tamil Nadu, India
High performance micro sensors are important to detecting special nuclear materials radiations in different fields to save the globe. This paper is mainly focused on to develop a MEMS based bolometer for detecting the nuclear radiation to provide the high security in Nuclear power Plants. A thermally sensitive micro metal plate is designed and placed on a substrate through micro thermal link. The ...
J. Hrdlicka, P. Cervenka, M. Pribyl, and D. Snita
Department of Chemical Engineering, Institute of Chemical Technology Prague, Prague, Czech Republic
In this paper we present results of the mathematical modeling of AC electroosmotic micropumps. Unlike others we use the full dynamic description, instead of the linearized model. Skewed hybrid discretization meshes are employed in order to accurately capture the main features of the studied system. Also, we introduce zig-zag electrode arrangements for traveling-wave electroosmotic micropumps. The ...