University of Kassel, Kassel, Germany
In order to design an RF MEMS based device, it is beneficial to have information concerning mechanical behavior. For model verification purpose, solution offered by simulation software equipped with predefined physics application is one valuable way to provide initial reference. To avoid unwanted particular total strain in RF MEMS structures, a compensation layer can be utilized. When the number ...
Numerical and Experimental Evaluation for Measurement of a Single Red Blood Cell Deformability Using a Microchannel and Electric Sensors
Kyoto University, Kyoto City, Kyoto, Japan
An electric micro-resistance sensor that can continuously measure the deformability of a single red blood cell (RBC) in a microchannel and a numerical model that can simulate the resistance and capacitance of the cell membrane and cytoplasm are developed and improved. The resistance signal pattern between the electrodes is measured to evaluate the feasibility of the present sensor, using the ...
Boopathi S, Ms.E.Malar, Deepan Chakravarthi P
Department of Biomedical Engineering, PSG College of Technology, Coimbatore, Tamil Nadu, India
This paper deals with an integrated numerical and experimental analysis work aiming at the investigation of the thermal stress on nanowires in electronic gadgets especially computers and mobile phones. The comparative study of the nanowires are analyzed through the Thermal Stress physics using different variants such as Cu, Al, ZnO, Si(c), SiO2 which can be used in sensors, solar cells, LCD, ...
T. Klose, H. Conrad, T. Sandner, and H. Schenk
Fraunhofer Institute Photonic Microsystems (FhG-IPMS), Germany
TU Dresden, Semiconductor and Microsystems Technology Laboratory, Germany
Damping is the liminting factor for the reachable maximum deflection. Thus, it is a very important issue for resonant microsystems. In this paper, we present a damping model for out-of-plane comb driven resonant micromirrors. The basic concept of this model is to attribute viscous damping in the comb gaps as the dominant contributor of damping moments. The model is extended by findings from a ...
H. T. D. Grigg, and B. J. Gallacher
Newcastle upon Tyne
Tyne and Wear, UK
This paper presents ongoing research aimed at development of a MEMS magnetometer capable of nanoTesla sensitivity. Such a device would pave the way for inertial-grade MEMS IMUs. A resonant sensor is proposed, based on a Xylophone Bar sense element, and is analysed both directly and via COMSOL. Mode shapes and frequencies are found as functions of geometric parameters, and the results used ...
Finite Element Evaluation of Surface Acoustic Wave Reflection and Scattering from Topographic Irregularities Comparable with the Wavelength
S. Yankin[1,2], S. Suchkov, S. Nikitov[2,3], B. Sveshnikov, I. Shatrova 
Joint International Laboratory LICS/LEMAC, IEMN UMR CNRS 8520, EC Lille,Villeneuve d’Ascq, France
Saratov State University, Saratov, Russia
Institute of Radio-engineering and Electronics, Russian academy of Science, Moscow, Russia
Design of SAW devices needs the accurate study of the scattering fields, arising from the interaction of SAW with topographic irregularities. To solve this problem FE methods very perspective, because with its help one can take into account the actual geometry of the electrodes and reflectors. This work describes results of original time domain calculation of 2D SAW scattering fields in delay ...
H. Schweiger, T. Göstenkors, R. Bau, D. Zielke
Dept. Engineering Sciences and Mathematics, University of Applied Sciences Bielefeld, Bielefeld, Germany
In this paper we want to figure out the development of a capacitive acceleration-sensor system with the FEM-Method. The sensor-system is in the position to detect accelerations in the range of ±20 g. Furthermore the sensor-element contains a printed RF-inductance, which is used for contactless data transfer. On the one hand the simulation of the L-C-oscillating circuit using the RF Module of ...
R.V. Iyer, Vinay K., A. R. Kamath, A. Goswami, A. Sharma, A. V. Joshi, A. Mishra, N. S. Pai, S. Chakraborty, Rakesh D.
PES Institute of Technology, Bangalore, Karnataka, India
This abstract addresses the effect of scaling in air gap MOSFETs and determination of functional relationship between scaling parameter and sensitivity, frequency response. The modelling of the MOSFET and its simulations has been carried out using COMSOL Multiphysics. An air Gap MOSFET in its simplest form can be imagined to be one obtained by replacing the dielectric in a MOSFET with air. The ...
Empirical Model Dedicated to the Sensitivity Study of Acoustic Hydrogen Gas Sensors Using COMSOL Multiphysics®
A. Ndieguene, I. Kerroum, F. Domingue, A. Reinhardt
Laboratoire des Microsystèmes et de Télécommunications/Université du Québec à Trois-Rivières, Trois-Rivières, QC, Canada
Laboratoire d’Électronique et des Technologies de l’Information, CEA, LETI Grenoble, France
Due to the increasing demand for hydrogen gas sensors for applications such as automation, transportation, or environmental monitoring, the need for sensitive and reliable sensors with a short response time is increasing. This paper presents an empirical model that studies the sensitivity of acoustic hydrogen gas sensors. A parametric study based on the variation of physical properties of ...
A. Piyadasa[1,3], P. Gao[1,2,3]
Department of Physics, University of Connecticut, Storrs, CT, USA
Department of Materials Science & Engineering, University of Connecticut, Storrs, CT, USA
Institute of Materials Sciences, University of Connecticut, Storrs, CT, USA
3D finite element analysis model has been constructed for testing the directional dependence in a novel form of nanowire array gas flow sensor. Single nanowire (p-type single crystal Silicon) model is developed using fluid structure interaction and piezoresistivity components in the MEMS Module for COMSOL Multiphysics® software. Change in resistivity tensor due to induced stress in the nanowire ...