O. Sardan, D. Petersen, O. Sigmund, and P. Boggild
DTU Nanotech, Denmark
DTU Mechanical Engineering, Denmark
In this work, electrothermal microgrippers designed using topology optimization are modeled. The microgrippers are composed of two 5 μm-thick polysilicon actuators facing each other. The gap between the actuators are 2 μm in the initial state and the microgrippers are able to both fully close and further open this gap. The operation principle of the actuators is quite similar to that of a ...
H. T. D. Grigg, and B. J. Gallacher
Newcastle upon Tyne
Tyne and Wear, UK
This paper presents ongoing research aimed at development of a MEMS magnetometer capable of nanoTesla sensitivity. Such a device would pave the way for inertial-grade MEMS IMUs. A resonant sensor is proposed, based on a Xylophone Bar sense element, and is analysed both directly and via COMSOL. Mode shapes and frequencies are found as functions of geometric parameters, and the results used ...
University of Kassel, Kassel, Germany
In order to design an RF MEMS based device, it is beneficial to have information concerning mechanical behavior. For model verification purpose, solution offered by simulation software equipped with predefined physics application is one valuable way to provide initial reference. To avoid unwanted particular total strain in RF MEMS structures, a compensation layer can be utilized. When the number ...
K. M. V. Swamy, B. G. Sheeparamatti, G. R. Prakash
Basaveshwara Engineering Collage, Bagalkot, Karnataka, India
This work presents the study of spiral RF MEMS switch which has low actuation voltage due to spiral structure. This work is inspired by the superior performance of electrostatic RF MEMS switches over the conventional state-of-the-art solid-state devices and the potential applications in communication field. The customary high actuation voltage limits the reliability and applications especially in ...
J. Wala, D. Maji, S. Dhara, S. Das
Indian Institute of Technology Kharagpur, Kharagpur, West Bengal, India
Cells are complex entities which not only passively sense external stimuli (viz. chemical, optical or mechanical) but also interact with extracellular matrix (ECM) by regulating cellular behavior such as growth, proliferation, migration, etc. Monitoring cell growth and migration of adherent cells becomes a crucial factor in determining cell-cell and cell-substrate interaction, important for ...
N. Bhalla, S. Li, and D. Chung
Chung Yuan Christian University, Chungli,Taiwan
National Tsing Hua University, Hsinchu, Taiwan
Investigation in this paper aims at performing Mechanical Stress Strain analysis, Thermal, Piezoresistive and Piezoeletric analysis of Silicon Structures using COMSOL. The simulation results have been cross checked by mathematical calculation.
S. Logeshkumar, L. Lavanya, G. Anju, and M. Alagappan
PSG College of Technology
Tamil Nadu, India
In the model silicon nanorods are designed as cantilever array and coated with thin film of aluminum or aluminum nitride, to be characterized, thus, adding a detectable mass and altering the cantilever resistance to bending. The simulated results show that when films of different thickness are placed on the cantilever, there is a corresponding change in the resonant frequency and the ...
Design of a MEMS Resonator for a Centre Frequency Greater than 26.35 MHz and Temperature Coefficient Frequency Less than 0.5 ppm
S.Manikandan, R.Radeep krishna
Kalasalingam University, Department of ECE, Srivilliputtur ,Krishnan koil, Tamil Nadu, India
The variability of the design parameters caused by material properties like thermal conductivity is the major challenge in Micro Electromechanical System (MEMS). In resonator design the basic problem is that the frequency changes with temperature variation and quantitative explanation with respect to this varies. The change can be attributed to the stability in terms of frequency drift in parts ...
V. Sharma, A. K. Jayanthy, J. G. Baruah, J. V. Prabhu, K. Balakrishnan
SRM University, Chennai, Tamil Nadu, India
The analysis performed is categorized into two levels: 1. The thermal stress distribution on the sensing part with the variation in the substrate three glass material with appropriate dimensions and exposures. The reason behind this consideration of different materials is test the compatibility with the crystal. This variation in substrate material and its material properties shows which is ...
S. Burgarella, B. Dell’Anna, V. Perna, G. Zarola, and S. Merlo
STMicroelectronics, Agrate Brianza, MI, Italy
Dipartimento di Elettronica, Università degli Studi di Pavia, Pavia, Italy
Dielectrophoresis (DEP) is a method for cell manipulation without physical contact in lab-on-chip devices, since it exploits the dielectric properties of cells suspended in a microfluidic sample, under the action of locally generated high-gradient electric fields. The DEP platform that has been developed offers an integrated solution for customizable applications. Several functional units, ...