A. R. Kalaiarasi, and S. H. Thilagar
Electrothermal actuators are capable of providing larger displacements compared to electrostatic actuators. Four designs for ETC actuators with the same material properties and same dimensions are studied.
V. S. Selvakumar, M. S. Gowtham, M. Saravanan, S. Suganthi, and L. Sujatha
Rajalakshmi Engineering College
Micro-tweezers have been widely investigated because of their extensive applications in micro-fluidics technology, microsurgery and tissue-engineering. It has been reported that thermal actuation provides greater forces and easier control when compared to electrostatic micro actuation. In this paper, we discuss about the effects of Alumina as gripper on the operation of micro tweezers. The ...
M. Ramya, R. P. S. Valli, R. Vidya, G. Anju, and M. Alagappan
PSG College of Technology
Tamil Nadu, India
In this study, a biomimetic vibrating 3D MEMS Gyroscope is designed, consisting of two circular diaphragms with a club shaped structure placed over one of them. This MEMS based vibrating gyroscope was modeled and simulated using COMSOL Multiphysics 4.1 - MEMS module. The purpose of the research was to develop an effective gyroscope for guidance and control of mobile robots. The simulated ...
V. Sista, and E. Bhattarchaya
Microelectronics and MEMS Lab
Department of Electrical Engineering
Indian Institute of technology Madras
A MEMS based Knudsen’s pressure gauge working in the range of 1e-5 mbar to 10 mbar is designed and simulated in COMSOL. The working principle is based on Knudsen’s forces that arise when two plates are held at different temperatures and their separation is comparable to the mean free path of the ambient gas molecules. The forces change the separation between the plates and capacitance between ...
P. K. Podder, D. Mallick, D. P. Samajdar, and A. Bhattacharyya
Institute of Radio Physics and Electronics
University of Calcutta
West Bengal, India
In this paper, we have addressed the issues related to the design and simulation of MEMS based silicon micro-needles for insertion of fluid into the dermis layer and into the subcutaneous fat layer. In addition, a poly-silicon micro-pump based on the principle of electrostatic actuation has been designed and simulated which can be integrated with the proposed micro-needles to control the fluid ...
Heat Generation from Dielectric Loss, Internal Heat Generation and Vibration in COMSOL4.2 Multiphysics
T. R. Jeba, B. Vins, and V. Ramamoorthy
This paper presents a FEA approach to estimate temperature rise and thermal stress experienced in PZT/Solid structure due to internal heat generation and dynamic excitation. The power dissipative density consumed by structural damping of the mass structure, internal heat generation due to applied voltage and dielectric loss of the PZT material is first determined. The dissipative power is then ...
K K BIRLA GOA CAMPUS
Spacecrafts have a prime necessity that their temperature be controlled. This paper presents the simulation of a mechanically actuated field effect transistor that is used in a thermal system. It comprises of a composite beam, a piezoelectric substrate and a field effect transistor. The temperature rise causes a deflection in the composite beam thereby causing it to impinge on the piezoelectric ...
H. T. D. Grigg, and B. J. Gallacher
Newcastle upon Tyne
Tyne and Wear, UK
This paper presents ongoing research aimed at development of a MEMS magnetometer capable of nanoTesla sensitivity. Such a device would pave the way for inertial-grade MEMS IMUs. A resonant sensor is proposed, based on a Xylophone Bar sense element, and is analysed both directly and via COMSOL. Mode shapes and frequencies are found as functions of geometric parameters, and the results used ...
J. Muraoka, and T. Suzuki
Yamagata Research Institute of Technology
The traveling wave ultrasonic vibration disks for dispersion of particles were designed by using of FEM analysis. The vibration disks are required specific vibration pattern, which contains three nodal lines. The vibration disk thickness was calculated to be matched the resonance frequency of bolted langevin type transducer and the specific vibration pattern. The alignment of the transducer was ...
In recent years, optical manipulation using optical radiation pressure has been widely studied. In this study, the radiation pressure exerted on various kinds of microscopic objects with different laser beams was evaluated by COMSOL Multiphysics software. By changing beam shapes, microscopic objects can be trapped and rotated. This paper is in Japanese.