S. N. Das, G. Bose
Centurion University of Technology and Managment, Jatani, Bhubaneswar, Orissa, India
Institute of Technical Education and Research, SOA University, Bhubaneswar, Orissa, India
This paper describes the characteristics of MEMS microchannel and various issues of its designing. Here the major parameters are pressure drop and heat transfer rate. Various structures are modeled and optimized to get a minimum pressure drop and maximum heat transfer rate. The simulation results provide the characterization for Temperature, Mass flow rate, Pressure drop and Reynolds number. Here ...
J. J. Ruz Martinez
Instituto de Microelectronica de Madrid
The motion of a resonant NEMS has been widely studied for many different applications such as structural mechanics in engineering, ultra sensitive mass spectrometers or the well known Atomic Force Microscope. The study of the eigenfrequencies of such structures is very important, and nowadays there are good theoretical methods to accurately predict such eigenfrequencies. When a little mass is ...
BITS Pilani K K BIRLA GOA CAMPUS
The actuator comprises of a temperature sensitive composite deflecting beam, a piezoelectric substrate and a field effect transistor. The temperature rise causes an expansion in the composite beam thereby causing it to deflect. The deflecting beam impinges on the piezoelectric crystal and generating voltage. Response curves for the deflection versus temperature for temperature ranges ...
This paper covers the following: * All-Optical Light Modulation of surface plasmon polaritons (SPPs) is achieved using asymmetric single nanoslits. A high on/off switching ratio of >20 dB and phase variation of >? were observed with the device lateral dimension of only about 2 ?m. * Efficient unidirectional excitation of SPP as well as beam splitting are achieved using the ...
L. Wright, G. Memoli, P. Jones, E. Stride
National Physical Laboratory, Teddington, UK
University College London, London, UK
University of Oxford, Oxford, UK
Understanding the interactions between microbubbles and surfaces is key to the successful deployment of microbubbles in a range of applications. Two important examples are their use as a drug delivery mechanism, and their potential use of acoustically-driven bubbles as microscale sensors. Drug delivery with bubbles involves sonication at high frequency close to a boundary, and sensing with ...
The Simulation of Motion of a Slider upon a Stator Due to Frictional Force Using COMSOL Multiphysics® Software - new
H. B. Nemade
Indian Institute of Technology Guwahati, Guwahati, Assam, India
The Surface Acoustic Wave (SAW) linear motor was studied which is developed utilizing the friction principle for driving. The principle says that, when a slider is placed on the Rayleigh waves generated on a stator, the slider moves in reverse direction of the wave due to friction between the stator and the slider. A LiNbO3 piezoelectric substrate is used as a stator where comb structured Al ...
M. Roshini, G .B. Priyanga, K. C. Devi
PSG College of Technology, Coimbatore, Tamil Nadu, India
The objective of this paper is to design and simulate Carbon Nano-Tube (CNT) based mass sensor that determines extremely low measures of molecules using COMSOL Multiphysics® software. The ultimate goal of this nanomechanical resonator sensor is that it allows detection at single molecular level. The change in the mass from the resonator can cause a shift in the resonant frequency. The ...
V. Jain, A. K. Sharma, P. Kumar
Thapar University, Patiala, Punjab, India
Indian Institute of Technology Roorkee, Roorkee, Uttar Pradesh, India
The greatest challenge being faced for realization of Micro-Electro Mechanical System (MEMS) technology is the lack of a simple, quick and reliable method for the fabrication of 3-D microchannel in the range of micrometers. A novel fabrication technique which opens possibilities for the production of these microfluidic channels is presented in this paper. The present paper highlights the ...
Experimentally Matched Finite Element Modeling of Thermally Actuated SOI MEMS Micro-Grippers Using COMSOL Multiphysics
M. Guvench, and J. Crosby
University of Southern Maine, Gorham, Maine, USA
In “Micro-Electro-Mechanical-Systems” shortly known as MEMS, one of the most important and effective principle of creating transduction of electrical power to displacement force is thermal expansion. A slim beam of MEMS material, typically Silicon, is heated by the application of electrical current via Joule heating; it expands and creates motion. In the design of many MEMS devices ...
T. Klose, H. Conrad, T. Sandner, and H. Schenk
Fraunhofer Institute Photonic Microsystems (FhG-IPMS), Germany
TU Dresden, Semiconductor and Microsystems Technology Laboratory, Germany
Damping is the liminting factor for the reachable maximum deflection. Thus, it is a very important issue for resonant microsystems. In this paper, we present a damping model for out-of-plane comb driven resonant micromirrors. The basic concept of this model is to attribute viscous damping in the comb gaps as the dominant contributor of damping moments. The model is extended by findings from a ...