In recent years, optical manipulation using optical radiation pressure has been widely studied. In this study, the radiation pressure exerted on various kinds of microscopic objects with different laser beams was evaluated by COMSOL Multiphysics software. By changing beam shapes, microscopic objects can be trapped and rotated. This paper is in Japanese.
L.B.M. Silva, E.J.P. Santos
Laboratory for Devices and Nanostructures, Electronics and Systems Department, Universidade Federal de Pernambuco, Recife, PE, Brasil
Transducer optimization is a key aspect for successful development and deployment of advanced sensors, especially when designing 3D structures for harsh environments. For piezoelectric transducers, plate thickness determines the operating frequency of the resonator, which is frequently tuned in the shear thickness vibration mode. Quartz has been the material of choice for the fabrication of bulk ...
Shambhu Singh, Dr. N N Sharma
Birla Institute of Technology and science, Pilani, Rajasthan, India
A solid state Piezoelectric Micro Machined Modal Gyroscope is a vibratory type of gyroscope which sense the motion by voltage induced due to Coriolis force. It utilizes natural frequency of the structure to maximize the displacements and hence maximizing the induced voltage signals for sensing.The mode suitable for gyroscopic motion is 9th mode, which was found to be vibrating at 350.217 kHz. A ...
J. A. Andrews, R. Chaubey, G. Dwivedi, V. Dwivedi, N. Sagar
National MEMS Design Center, Department of Applied Physics, Shri G S Institute of Technology & Science, Indore, Madhya Pradesh, India
Optical tweezers work on the idea of non-contact Optical Pressure felt by transparent particles, when shined by coherent light source such as lasers. On the other hand when light falls on the metal it excites the electron inside it and make them free. When these free electron cloud moving in an harmonic frequency it satisfies the resonance condition called surface plasmon resonance (SPR). We ...
Extraction of COM Parameters and Quality Factor of One Port SAW Resonator Using FEM Based Simulation
A. K. Namdeo, H. B. Nemade
Department of Electronics and Electrical Engineering, Indian Institute of Technology Guwahati, Assam, India
The paper presents a method of extraction of coupling of modes (COM) parameters for a one port surface acoustic wave (SAW) resonator from the results of finite element analysis in COMSOL Multiphysics®. The COM parameters calculated are electromechanical coupling coefficient, reflection coefficient, and SAW phase velocity. In addition, the quality factor of the SAW resonator is determined. The ...
A. Ricci, E. Giuri, and C. Ricciardi
Microcantilevers made of crystal silicon are probably the most diffused type of MEMS because of their simple fabrication and their vast applications. In this presentation we treat the mechanical behaviour of silicon mirocantilevers, and also give an overview of the many application areas that these apply to.
E. Kamau, and F. Voigt
University of Oldenburg, Germany
Cantilever vibration modes were simulated with COMSOL Multiphysics. In the 1st approach the model consisted of an excitation piezo, a holder plate and a chip where the cantilever was mounted on. A sinusoidal voltage signal was applied to the piezo in the simulation, which resulted in movements of the holder plate and finally led to the excitation of the cantilever. In the 2nd approach the model ...
O. Sardan, D. Petersen, O. Sigmund, and P. Boggild
DTU Nanotech, Denmark
DTU Mechanical Engineering, Denmark
In this work, electrothermal microgrippers designed using topology optimization are modeled. The microgrippers are composed of two 5 μm-thick polysilicon actuators facing each other. The gap between the actuators are 2 μm in the initial state and the microgrippers are able to both fully close and further open this gap. The operation principle of the actuators is quite similar to that of a ...
University of Applied Sciences, Regensburg, Germany
This paper gives an overview of modelling microsensors on geometry and system level. The focus will be on the generation of the multiphysics reduced order system model and the coupling with package and ASIC models. The method is based on modal superposition. This means all the details of the sensor can be considered in a finite element model. The mechanical mode shapes of this model form the ...
J. J. Ruz Martinez
Instituto de Microelectronica de Madrid
The motion of a resonant NEMS has been widely studied for many different applications such as structural mechanics in engineering, ultra sensitive mass spectrometers or the well known Atomic Force Microscope. The study of the eigenfrequencies of such structures is very important, and nowadays there are good theoretical methods to accurately predict such eigenfrequencies. When a little mass is ...