Optical and Electronic Materials Unit
National Institute for Materials Science
A single-crystal diamond NEMS switch was fabricated while batch production of SCD MEMS/NEMS structures were developed. The diamond NEMS switches exhibit high performance with respect to high controllability, high reproducibility, and good reliability. Modeling and simulations were made that were consistent with experiments.
In recent years, optical manipulation using optical radiation pressure has been widely studied. In this study, the radiation pressure exerted on various kinds of microscopic objects with different laser beams was evaluated by COMSOL Multiphysics software. By changing beam shapes, microscopic objects can be trapped and rotated. This paper is in Japanese.
Modeling of Silicon Piezoresistive Pressure Sensor: Application to Prevent Some Diabetes Complications
F. Kerrour, A. Beddiaf, M. Benabbas-Marir
MODerNa Laboratory, University Mentouri, Constantine, Algeria
Several analytical solutions describing the mechanical behavior of a silicon micro membrane deflection, perfectly embedded and subjected to a uniform and constant pressure have been proposed. The obtained results are compared with those obtained by using COMSOL software for a rectangular diaphragm deflection. COMSOL Multiphysics is powerful software for solving problems based on partial ...
A. Corigliano, A. Courard, G. Cocchetti, P. Gagliardi, L. Magagnin, R. Vallauri, D. Acconcia
Politecnico di Milano, Milano, Italy
Technoprobe, Cernusco Lombardone, Italy
The paper presents recent results concerning the experimental mechanical characterization, the numerical modeling and the design of micro-needles used in the construction of probe heads for wafer testing. A fully coupled electro-thermal model was created using COMSOL and combined to a research-oriented thermo-mechanical Finite Element (FE) code in order to accurately reproduce the micro-needle ...
Reliability Enhancement of Bio MEMS based Cantilever Array Sensors for Antigen Detection System using Heterogeneous Modular Redundancy
L. S. Sundharam
Kumaraguru college of Technology, Coimbatore, Tamil nadu, India
The objective of the work is to propose a reliability enhancement model for antigen detection system (ADS) using bio MEMS based cantilever array sensors using heterogeneous modular redundancy technique. The reliability of the ADS is expressed in terms of the constituent sub systems which are heterogeneous not only in their respective structures and behaviors but also in their forms. The possible ...
G. Maizza and A. Tassinari
Dipartimento di Scienza dei Materiali ed Ingegneria Chimica, Politecnico di Torino, Torino, Italy
Capacitor Discharge Sintering (CDS) is an ultrafast Electric Current Assisted Sintering method (u-ECAS) suited for electrically conductive powders. It is characterized by relatively short processing times (milliseconds range) and much lower sintering temperatures than the melting point of the powders. However, the CDS basic phenomena are not fully understood yet neither at the macroscale nor at ...
A component used in RF-MEMS systems is the electrostatically actuated shunt switch. We show how this type of switch can be simulated using a simple mechanical FEMLAB model where electrostatic forces are modelled by a pressure load. The static as well as dynamic properties of the switch are analysed, e.g. static pull in and pull out voltages and displacements, dynamic switch up and down times ...
Yokohama National University, Japan
In this presentation, we present our work on optically controlled microfluidic systems. This includes both numerical simulations and experiments.
T. Klose, H. Conrad, T. Sandner, and H. Schenk
Fraunhofer Institute Photonic Microsystems (FhG-IPMS), Germany
TU Dresden, Semiconductor and Microsystems Technology Laboratory, Germany
Damping is the liminting factor for the reachable maximum deflection. Thus, it is a very important issue for resonant microsystems. In this paper, we present a damping model for out-of-plane comb driven resonant micromirrors. The basic concept of this model is to attribute viscous damping in the comb gaps as the dominant contributor of damping moments. The model is extended by findings from a ...
IIT Kharagpur, Kharagpur, West Bengal, India
Electroosmotic flow of power-law fluids in a slit channel(1D) is analyzed. The governing equations are the Poisson–Boltzmann equation, the Cauchy momentum equation, Generalized Smoluchowski equation and the continuity equation are used to get shear stress, dynamic viscosity, and velocity distribution. Simulations are performed to examine the effects of ?H, flow behavior index, double layer ...