Combined Analytical and Numerical Modeling of a Resonant MEMS Sensor for Viscosity and Mass Density Measurements
S. Cerimovic, R. Beigelbeck, H. Antlinger, J. Schalko, B. Jakoby, and F. Keplinger
Institute of Sensor and Actuator Systems, Vienna University of Technology, Vienna, Austria
Institute for Integrated Sensor Systems, Austrian Academy of Sciences, Wiener Neustadt, Austria
Institute for Microelectronics and Microsensors, Johannes Kepler University Linz, Linz, Austria
A resonant MEMS sensor for viscosity and mass density measurements of liquids was modeled. The device is based on Lorentz-force excitation and features an integrated piezoresistive readout. The core sensing element is a rectangular vibrating plate suspended by four beam springs. The liquid surrounding the plate influences the resonant behavior of the system. Thus, evaluating the properties of ...
D. Krizaj, I. Iskra, Z. Topcagic, and M. Remskar
University of Ljubljana, Faculty of Electrical Engineering, Ljubljana, Slovenia
Institut Jozef Stefan, Ljubljana, Slovenia
We are developing nanoparticle detector for airborn particles. The detection principle is based on condensation of nanoparticles forming micron sized water droplets and detection of the droplets by a capacitive type nanodetector. We have successfully performed some experimental evaluations of the detection principle and are in the stage of optimization of several parts of the system. As shown ...
D. Mallick, and A. Bhattacharyya
Institute of Radio Physics and Electronics
University of Calcutta
West Bengal, India
Micromirror is a versatile MEMS device, which finds use in many application areas. In this paper, we have addressed the issues related to the design and behavioral simulation of MEMS based electro-thermal micromirror [Figure 1] for 3D motion. Two types of thermal actuation mechanism are used in the designed device. For in-plane movement poly-silicon made two-hot-arm actuatoris used. Here, the ...
K K BIRLA GOA CAMPUS
Spacecrafts have a prime necessity that their temperature be controlled. This paper presents the simulation of a mechanically actuated field effect transistor that is used in a thermal system. It comprises of a composite beam, a piezoelectric substrate and a field effect transistor. The temperature rise causes a deflection in the composite beam thereby causing it to impinge on the piezoelectric ...
Dynamic Observation of Magnetic Particles in Continuous Flow Devices by Tunneling Magnetoresistance Sensors
A. Weddemann, A. Auge, F. Wittbracht, C. Albon, and A. Hütten
Department of Physics, Thin Films and Physics of Nanostructures, Bielefeld University, Bielefeld, Germany
Dynamic measurement of magnetic particles in continuous flow devices is made very difficult by the limitations imposed by the sensors themselves. Thus, certain sensor layouts are restricted to either number sensitive or spatial resolutive measurements of magnetic particles. We investigate different new strategies to increase the detection threshold and introduce designs accomplishing both: ...
Berthier, J., Chatelain, F.
Polymerase chain reaction is the most usual way to amplify DNA strands for detection and biorecognition. However efficient biorecognition requires to perform many different PCRs at the same time. We present here a new concept of simultaneous PCRs in capillary tubes and more specifically the dimensioning of such a microsystem. The concept consists in performing different PCRs in annular rings ...
S. Nelson, and M. Guvench
University of Southern Maine, Gorham, Maine, USA
COMSOL Multiphysics is employed to model, simulate and predict the performance of a high Q, in-plane rotational resonating MEMS sensor. The resonating sensor disk is driven by thermal expansion and contraction of the support tethers due to AC joule heating. The resonant frequency is sensed by stationary contacts. For cost reduction, the relatively simple, low cost SOIMUMPS fabrication process is ...
Bruce A. Finlayson
University of Washington
This talk demonstrates the success in teaching chemical engineering undergraduates to use COMSOL Multiphysics (FEMLAB) to solve realistic problems in a project format. Undergraduates have been creative and solved problems much more difficult than those in their textbooks, thus gaining a deeper understanding of transport processes. Illustrations are also given how they check to see they’ve ...
University of Cambridge
This work presents a different use of COMSOL as an integrated component of a computational tool framework used to automate designs creation. CNS-Burst is a computational synthesis method that has been implemented with the aim of automatically generating solutions to an assigned design task. COMSOL is integrated in the method and used to evaluate the performance of the design solutions found. ...
N. Qudus, T. Mahbub, S. A. Ali, and M. Shajahan
 Bangladesh University of Engineering and Technology, Dhaka Bangladesh
A finite element model is employed to describe the electric potential distribution and electroosmotic flow field inside a wavy cylindrical channel. The model uses coupled Laplace and Poisson-Boltzmann to evaluate the electric potential distribution inside the channel. It also contains continuity and Navier–Stokes equations for the solution of fluid flow. A particle trajectory model was ...