Optical and Electronic Materials Unit
National Institute for Materials Science
A single-crystal diamond NEMS switch was fabricated while batch production of SCD MEMS/NEMS structures were developed. The diamond NEMS switches exhibit high performance with respect to high controllability, high reproducibility, and good reliability. Modeling and simulations were made that were consistent with experiments.
IIT Kharagpur, Kharagpur, West Bengal, India
Electroosmotic flow of power-law fluids in a slit channel(1D) is analyzed. The governing equations are the Poisson–Boltzmann equation, the Cauchy momentum equation, Generalized Smoluchowski equation and the continuity equation are used to get shear stress, dynamic viscosity, and velocity distribution. Simulations are performed to examine the effects of ?H, flow behavior index, double layer ...
A component used in RF-MEMS systems is the electrostatically actuated shunt switch. We show how this type of switch can be simulated using a simple mechanical FEMLAB model where electrostatic forces are modelled by a pressure load. The static as well as dynamic properties of the switch are analysed, e.g. static pull in and pull out voltages and displacements, dynamic switch up and down times ...
P. Cendula, S. Kiravittaya, J. Gabel, and O.G. Schmidt
Institute for Integrative Nanosciences, Dresden, Germany
Strained wrinkled and flat nanomembranes have different bending properties when they are released from the underlying substrate. This is caused by increased bending rigidity of the wrinkled film in one direction. We provide theoretical and numerical analysis of the directional rolling of wrinkled films, which is important for positioning rolled-up tubes on the short mesa edge during fabrication.
A. Weddemann, A. Hütten, S. Herth, and M. Schilling
Universität Bielefeld, Fakultät für Physik, Bielefeld
In this work, a system for magnetic and hydrodynamic manipulation of magnetic beads is modelled. A geometry is introduced to assure a good separation behaviour with respect to the magnetic moment of the particles. Different separation mechanisms will be discussed and an estimation of the minimal difference of separable magnetic moments will be given. Further it will be shown, that the ...
T. Klose, H. Conrad, T. Sandner, and H. Schenk
Fraunhofer Institute Photonic Microsystems (FhG-IPMS), Germany
TU Dresden, Semiconductor and Microsystems Technology Laboratory, Germany
Damping is the liminting factor for the reachable maximum deflection. Thus, it is a very important issue for resonant microsystems. In this paper, we present a damping model for out-of-plane comb driven resonant micromirrors. The basic concept of this model is to attribute viscous damping in the comb gaps as the dominant contributor of damping moments. The model is extended by findings from a ...
Combined Analytical and Numerical Modeling of a Resonant MEMS Sensor for Viscosity and Mass Density Measurements
S. Cerimovic, R. Beigelbeck, H. Antlinger, J. Schalko, B. Jakoby, and F. Keplinger
Institute of Sensor and Actuator Systems, Vienna University of Technology, Vienna, Austria
Institute for Integrated Sensor Systems, Austrian Academy of Sciences, Wiener Neustadt, Austria
Institute for Microelectronics and Microsensors, Johannes Kepler University Linz, Linz, Austria
A resonant MEMS sensor for viscosity and mass density measurements of liquids was modeled. The device is based on Lorentz-force excitation and features an integrated piezoresistive readout. The core sensing element is a rectangular vibrating plate suspended by four beam springs. The liquid surrounding the plate influences the resonant behavior of the system. Thus, evaluating the properties of ...
A. Regtmeier, A. Weddemann, I. Ennen, and A. Hütten
Dept. of Physics, Thin Films and Physics of Nanostructures, Bielefeld University, Bielefeld, Germany
Dept. of Elect. Eng. and Comp. Science, Lab. for Electromagnetic and Electronic Syst., MIT, Cambridge, MA
Institute of Solid State Physics, Vienna University of Technology, Vienna, Austria
Superparamagnetic nanoparticles have a wide range of applications in modern electric devices. Recent developments have identified them as components for a new type of magnetoresistance sensor. We propose a model for the numeric evaluation of the sensor properties. Based on the solutions of the Landau-Lifshitz-Gilbert equation for a set of homogeneously magnetized spheres arranged in highly ...
S. Logeshkumar, L. Lavanya, G. Anju, and M. Alagappan
PSG College of Technology
Tamil Nadu, India
In the model silicon nanorods are designed as cantilever array and coated with thin film of aluminum or aluminum nitride, to be characterized, thus, adding a detectable mass and altering the cantilever resistance to bending. The simulated results show that when films of different thickness are placed on the cantilever, there is a corresponding change in the resonant frequency and the ...
R.V. Iyer, Vinay K., A. R. Kamath, A. Goswami, A. Sharma, A. V. Joshi, A. Mishra, N. S. Pai, S. Chakraborty, Rakesh D.
PES Institute of Technology, Bangalore, Karnataka, India
This abstract addresses the effect of scaling in air gap MOSFETs and determination of functional relationship between scaling parameter and sensitivity, frequency response. The modelling of the MOSFET and its simulations has been carried out using COMSOL Multiphysics. An air Gap MOSFET in its simplest form can be imagined to be one obtained by replacing the dielectric in a MOSFET with air. The ...