D.B. Carstensen, T.A. Christensen, and M. Willatzen
University of Southern Denmark
A surface acoustic wave (SAW) device consists of a piezoelectric material (or film) on which interdigitated transducers (IDT) are placed. Here, they are analyzed based on PZT-5H wurtzite ceramics and InSb zincblende crystals. In PZT-5H, it is possible to generate SAW’s by aligning the interdigitated transducers (IDT) with the crystal axes. In the case with InSb zincblende structures ...
Perspectives of Thermo-electro-mechanical Micro Actuators for Micro Switch Applications: Design and Simulation
M. Matmat, M. Al Ahmad, and J. Y. Fourniols
Laboratoire d'Analyse et d'Architecture des Systèmes (LAAS-CNRS), Toulouse, France
In this work, thermo-mechanical simulations employing a 3D finite element analysis (FEA) of a current driven V-shaped actuator is presented. The structure's hot arms consist of polysilicon, which was used as the active material for deflection due to the Joule effect.COMSOL Multiphysics with stationary and parametric solvers was used to calculate the resulting deflection when current is applied. ...
E. Kamau, and F. Voigt
University of Oldenburg, Germany
Cantilever vibration modes were simulated with COMSOL Multiphysics. In the 1st approach the model consisted of an excitation piezo, a holder plate and a chip where the cantilever was mounted on. A sinusoidal voltage signal was applied to the piezo in the simulation, which resulted in movements of the holder plate and finally led to the excitation of the cantilever. In the 2nd approach the model ...
University of Applied Sciences, Regensburg, Germany
This paper gives an overview of modelling microsensors on geometry and system level. The focus will be on the generation of the multiphysics reduced order system model and the coupling with package and ASIC models. The method is based on modal superposition. This means all the details of the sensor can be considered in a finite element model. The mechanical mode shapes of this model form the ...
N. Bhalla, S. Li, and D. Chung
Chung Yuan Christian University, Chungli,Taiwan
National Tsing Hua University, Hsinchu, Taiwan
Investigation in this paper aims at performing Mechanical Stress Strain analysis, Thermal, Piezoresistive and Piezoeletric analysis of Silicon Structures using COMSOL. The simulation results have been cross checked by mathematical calculation.
H. T. D. Grigg, and B. J. Gallacher
Newcastle upon Tyne
Tyne and Wear, UK
This paper presents ongoing research aimed at development of a MEMS magnetometer capable of nanoTesla sensitivity. Such a device would pave the way for inertial-grade MEMS IMUs. A resonant sensor is proposed, based on a Xylophone Bar sense element, and is analysed both directly and via COMSOL. Mode shapes and frequencies are found as functions of geometric parameters, and the results used ...
In recent years, optical manipulation using optical radiation pressure has been widely studied. In this study, the radiation pressure exerted on various kinds of microscopic objects with different laser beams was evaluated by COMSOL Multiphysics software. By changing beam shapes, microscopic objects can be trapped and rotated. This paper is in Japanese.
J. G. Immanuel, K. Poojitha, B. Viknesshwar, A. Gupta
PSG College of Technology, Peelamedu, Coimbatore, Tamil Nadu, India
The paper brings out the designing and implementation of blood viscosity monitoring device that gives us the INR to measure the effectiveness of anti coagulant medications .When a blood vessel is damaged, clotting cascade begins that results in blood clot. This process is affected by several medical conditions where it becomes mandatory for a patient to intake anti-coagulants. Thus to monitor ...
Dr. Piotr Kropelnicki
Mu Xiao Jing
Wan Chia Ang
Andrew B. Randles
Institute of Microelectronics, Agency for Science, Technology and Research, Singapore, Singapore
In this research, we performed multiple COMSOL Multiphysics® simulations. We analyzed the dispersion curves of waves in a LAMB wave pressure sensor; simulated a thin metal film in a microbolometer and observed the resulting stress; investigated the thermal behavior of an acoustic wave microbolometer; and modeled the fluid-structure interaction (FSI) for piezoelectric-based energy harvesting from ...
J. A. Andrews, R. Chaubey, G. Dwivedi, V. Dwivedi, N. Sagar
National MEMS Design Center, Department of Applied Physics, Shri G S Institute of Technology & Science, Indore, Madhya Pradesh, India
Optical tweezers work on the idea of non-contact Optical Pressure felt by transparent particles, when shined by coherent light source such as lasers. On the other hand when light falls on the metal it excites the electron inside it and make them free. When these free electron cloud moving in an harmonic frequency it satisfies the resonance condition called surface plasmon resonance (SPR). We ...