Combined Analytical and Numerical Modeling of a Resonant MEMS Sensor for Viscosity and Mass Density Measurements
S. Cerimovic, R. Beigelbeck, H. Antlinger, J. Schalko, B. Jakoby, and F. Keplinger
Institute of Sensor and Actuator Systems, Vienna University of Technology, Vienna, Austria
Institute for Integrated Sensor Systems, Austrian Academy of Sciences, Wiener Neustadt, Austria
Institute for Microelectronics and Microsensors, Johannes Kepler University Linz, Linz, Austria
A resonant MEMS sensor for viscosity and mass density measurements of liquids was modeled. The device is based on Lorentz-force excitation and features an integrated piezoresistive readout. The core sensing element is a rectangular vibrating plate suspended by four beam springs. The liquid surrounding the plate influences the resonant behavior of the system. Thus, evaluating the properties of ...
3D Stationary and Temporal Electro-Thermal Simulations of Metal Oxide Gas Sensor Based on a High Temperature and Low Power Consumption Micro-Heater Structure
N. Dufour, C. Wartelle, P. Menini
LAAS-CNRS, Toulouse, France
Renault, Guyancourt, France
The aim of this work was to simulate the electro-thermal behavior of a micro-hotplate used as a gas sensor, in order to compare the obtained results with a real structure. The structure has been designed in 3D and a stationary and a temporal study has been realized.
Simulation of Evaporating Droplets on AFM-Cantilevers II: Confocal Microscopy and Transversal Bending
T. Haschke, E. Bonaccurso, H.J. Butt, F. Schönfeld, and W. Wiechert
 Universität Siegen, Lehrstuhl für Simulationstechnik, Siegen
 Max-Planck-Institut für Polymerforschung, Mainz
 Institut für Mikrotechnik Mainz GmbH, Mainz
The evaporation process of microscopic drops was investigated by depositing them onto atomic force microscope (AFM) cantilevers and measuring the deflection of the cantilever in response to the presence of the drop. We could thus improve a previously presented FE simulation model by comparing the simulations of the cantilever’s transversal deflection to 3-D images of the cantilever’s ...
A. Auge, F. Wittbracht, A. Weddemann, and A. Hütten
Department of Physics, University of Bielefeld, Germany
Transport phenomena in spatially periodic magnetic systems, in particular the directed transport of magnetic beads in a so called magnetic ratchet (Brownian motor) are considered. Simulations are carried out to test and optimize this system, where the Smoluchowski equation with flux terms for the magnetic and gravitational force is used. Furthermore, experiments are carried out to verify the ...
J. Gozálvez-Zafrilla, and A. Santafé-Moros
Department of Chemical and Nuclear Engineering, Universidad Politécnica de Valencia, Valencia, Spain
The most successful nanofiltration models are those based on the combination of the Extended Nernst-Planck equation with the Donnan steric equilibrium. These models have been typically solved by using iterative procedures based on the Runge-Kutta method. Yet, such procedures present convergence problems in some cases. In this paper, we present an implementation of the original Donnan ...
K. Suresh, B.V.M.P.S. Kumar, U.V. Kumar, M. Umapathy, and G. Uma
National Institute of Technology Tiruchirapalli, Tamil Nadu, India
A proximity DC current sensor using of a piezo sensed and actuated cantilever beam with a permanent magnet mounted at its free end is designed and simulated in COMSOL Multiphysics. The change in resonant frequency of cantilever is a measure of the current through the wire. The sensor is found to be linear with good sensitivity.
M. F. Santillo1, and A. G. Ewing1,2
1Department of Chemistry, Pennsylvania State University, University Park, PA, USA
2Department of Chemistry, Göteborg University, Göteborg, Sweden
A microfluidic device for performing multiplexed cell bioassays has been successfully developed. The device takes advantage of laminar flow and hydrodynamic focusing in order to selectively load cells into various culture chambers and address cells with pharmacological agents. Both computational fluid dynamics (CFD) simulations and fluorescence microscopy illustrate how fluid flow can be ...
M. Itomlenskis, P. Fodor, and M. Kaufman
Physics Department, Cleveland State University, Cleveland, OH, USA
Relief patterning of the surface of microchannels has been actively pursued as a method of promoting mixing in systems with a low Reynold’s number (<<100). In this work, we explore, by using the COMSOL Multiphysics package and its Chemical Engineering Module, the possibility of enhancing the mixing quality of two fluids in a microchannel with a non-periodic fractal pattern of ridges ...
IEMN, Institut d’Electronique, de Microélectronique et de Nanotechnologie, UMR CNRS 8520, USTL Université des Sciences et Technologies de Lille, Villeneuve d’Ascq, France
The BioMEMS (Bio-Electro-Mechanical Systems) have become of considerable interest because they constitute a converging solution for many pluridisciplinary studies. The different covered fields are the biology (single cell, proteins, enzymes, neurons…), the chemistry (polymers), microelectronics and the microtechnologies associated with. Devices whose aim is the study of biological entities are ...
Optical and Electronic Materials Unit
National Institute for Materials Science
A single-crystal diamond NEMS switch was fabricated while batch production of SCD MEMS/NEMS structures were developed. The diamond NEMS switches exhibit high performance with respect to high controllability, high reproducibility, and good reliability. Modeling and simulations were made that were consistent with experiments.