MEMS Module

Researching with the MEMS Module

The MEMS Module contains modeling interfaces for electromechanical couplings, thermo-mechanical couplings, fluid-structural interactions, and microfluidics applications. Consider:



A pressure sensor gives the pressure through returning capacitance change - capacitance is related to the deformation of the structure. Deformation depends on the ambient pressure and temperature, on the materials used, and on any initial stresses in the material.

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