MEMS Module

User Stories

MEMS Biosensor Brings about Disposable DNA DetectorsMEMS Biosensor Brings about Disposable DNA Detectors

Dept. Mechanical Engineering, University of California, Santa Barbara, CA
Wouldn't it be a great service for the diagnosing and treating genetic of diseases if physicians had a disposable instrument for detecting DNA that worked...

Example Models

Piezoelectric Shear-Actuated BeamPiezoelectric Shear-Actuated Beam

The model performs a static analysis on a piezoelectric actuator based on the movement of a cantilever beam, using the Piezoelectric Devices predefined multiphysics interface. Inspired by work done by V. Piefort and A. Benjeddou, it...

Fluid-Structure InteractionFluid-Structure Interaction

This model demonstrates how to set up a fluid-structure interaction problem in COMSOL Multiphysics. It illustrates how fluid flow can deform solid structures and how to solve for the flow in a continuously deforming geometry. The...

Microresistor BeamMicroresistor Beam

This example illustrates the ability to couple thermal, electrical, and structural analysis in one model. This particular application moves a beam by passing a current through it; the current generates heat, and the temperature increase...

Electrostatically Actuated CantileverElectrostatically Actuated Cantilever

The elastic cantilever beam is one of the elementary structures used in MEMS designs. This model shows the bending of a cantilever beam under an applied electrostatic load. The model solves the deformation of the beam under an applied...

Squeezed-Film Gas Damping in an AccelerometerSqueezed-Film Gas Damping in an Accelerometer

Squeezed-film gas damping is a critical aspect of many MEMS transducers and actuators. In accelerometers, for example, inertia produces a motion that the device detects. A typical structure connects a large proof mass to surrounding...

Thermoelastic Damping in a MEMS ResonatorThermoelastic Damping in a MEMS Resonator

Thermoelastic damping, which arises when you subject a material to cyclic stress, is an important factor when designing MEMS resonators. The stress brings about deformation, where materials heat under compressive stress and cool under...

Biased Resonator Models (2D)Biased Resonator Models (2D)

Silicon micromechanical resonators have long been used for designing sensors and are now becoming increasingly important as oscillators in the consumer electronics market. In this series of models, a surface micromachined MEMS resonator,...

Thickness Shear Mode Quartz OscillatorThickness Shear Mode Quartz Oscillator

AT cut quartz crystals are widely employed in a range of applications, from oscillators to microbalances. One of the important properties of the AT cut is that the resonant frequency of the crystal is temperature independent to first...