A Tunable MEMS Capacitor
In an electrostatically tunable parallel plate capacitor, the distance between the two plates can be modified, as the applied voltage changes. The distance between the plates are tuned via a spring, to which one of the plates is attached. For a given voltage difference between the plates, the distance of the two plates can be computed, if the characteristics of the spring are known. In this model, an electrostatic simulation is carried out for a given distance.
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Electric potential (surface) and electric field (arrows) in the capacitor. |
Engineering Fields
- Actuators
- Electrostatic & Magnetostatics Applications
Application Areas
- MEMS
- Electro- & Magnetostatics