Electronegative inductively coupled plasma
Model ID: 12601
Electronegative plasmas exhibit different characteristics than electropositive discharges due to the presence of negative ions. This model simulates an inductively coupled plasma for a mixture of Argon (30%) and Oxygen (70%). The plasma chemistry consists of 62 reactions and 15 species. The negative ions are held in the core of the plasma because they cannot escape the ambipolar field.
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Number density of negative atomic oxygen ions in an inductively coupled plasma |
