Electrodeposition of an Inductor Coil
Model ID: 12613
This example models the deposition of an inductor coil in 3D. The geometry includes the extrusion of the deposition pattern into an isolating photoresist mask, and a diffusion layer on top of the photoresist.
The mass transfer of copper ions in the electrolyte has a major impact on the deposition kinetics, resulting in higher deposition rates in the outer parts of the deposition pattern. The model is solved in a time-dependent study using a moving mesh.
|Copper concentration and current stream lines in the electrolyte.|