Thermal Expansion in a MEMS Device
Model ID: 1870
This model analyzes the thermal expansion in a MEMS device, such as a microgyroscope, where thermal expansion should be minimized. The device is made from the copper-beryllium alloy UNS C17500 and uses temperature-dependent material properties from the Material Library.
The purpose of this model is to exemplify the use of the Material Library in COMSOL Multiphysics. This library contains more than 20,000 property functions for 2500 materials. The larger part of these properties are mechanical and thermal properties for solid materials given as functions of temperature. You need the Material Library to build the model.
|Temperature and displacement of the device. The edges of the original geometry are shown in black. The deformed shape is exaggerated by a factor of almost 200.|