Capacitive Pressure Sensor
Model ID: 476
A capacitive pressure sensor is simulated. This model shows how to simulate the response of the pressure sensor to an applied pressure, and also how to analyze the effects of packing induced stresses on the sensor performance.
A cross section through a capacitive pressure sensor, which has been mounted on a steel plate during its packaging process. The colors correspond to the displacement induced by thermal strains resulting from the packaging process as well as the displacement of the diaphragm due to an applied pressure.