Residual Stress in a Thin-Film Resonator
Model ID: 477
Surface micromachined thin films are often subject to residual stress. This COMSOL Multiphysics example describes a thin film resonator with straight or folded cantilever beam springs. The resonance frequencies of the resonator are affected by thermal stress. Using folded springs relieves this effect.
The example is made up of four models: two thin film resonators with folded cantilever beam strings in 2D and 3D, and two thin film resonators with straight cantilever beam strings in 2D and 3D. The folded flexures relieve axial stress.
|Deformed shape of the geometry for the thin-film resonator in 3D with folded cantilevers|