GEC CCP Reactor, Argon Chemistry, 1D
Model ID: 8646
The NIST GEC CCP reactor provides a platform for studying capacitively coupled plasmas. Even the simplest plasma models are quite involved so a 1D example helps in understanding the physics without excessive CPU time. The problem has no steady-state solution, although a periodic steady-state solution is reached after a suitable number of RF cycles (usually >1000).
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CAPACITIVELY COUPLED PLASMA: In a CCP reactor, there are no induction currents. Instead, the plasma is sustained by applying a sinusoidal electrostatic potential across a small gap filled with a low pressure gas. Here, we see the plot of power deposition at different phases of the RF cycle. |
