GEC ICP Reactor, Argon Chemistry
Model ID: 8649
The GEC cell was introduced by NIST in order to provide a standardized platform for experimental and modeling studies of discharges in different laboratories. The plasma is sustained via inductive heating. The Reference Cell operates as an inductively-coupled plasma in this model. This model investigates the electrical characteristics of the GEC reference cell for argon chemistry.
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INDUCTIVELY COUPLED PLASMAS: ICP Reactors typically operate at low pressures and high charge density. These are popular because low pressure ion bombardment leads to non-uniform wafer surfaces. This is a surface plot of the number density of excited argon atoms in the GEC ICP reactor. |
