In-Plane Microwave Plasma
Model ID: 8664
Wave heated discharges may be very simple, where a plane wave is guided into a reactor using a waveguide, or very complicated as in the case with ECR (electron cyclotron resonance) reactors. In this example, a wave is launched into reactor and an Argon plasma is created. The wave is partially absorbed and reflected by the plasma which sustains the plasma.
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MICROWAVE PLASMAS: In this cross flow configuration a TE mode wave enters from the top boundary. The wave is absorbed when it interacts with the plasma. The white contour shows the location where the electron density is equal to the critical electron density. The wave is completely absorbed by the plasma. |
