This model demonstrates how to set up a fluid-structure interaction problem in COMSOL Multiphysics. It illustrates how fluid flow can deform solid structures and how to solve for the flow in a continuously deforming geometry. The...
This is an overview presentation on the elastic waves and piezoelectric modeling features of COMSOL Multiphysics. The focus here is on piezo-features and especially COMSOL's strength in that you are allowed to mix dielectric, elastic,...
The elastic cantilever beam is one of the elementary structures used in MEMS designs. This model shows the bending of a cantilever beam under an applied electrostatic load. The model solves the deformation of the beam under an applied...
This example illustrates the ability to couple thermal, electrical, and structural analysis in one model. This particular application moves a beam by passing a current through it; the current generates heat, and the temperature increase...
The model performs a static analysis on a piezoelectric actuator based on the movement of a cantilever beam, using the Piezoelectric Devices predefined multiphysics interface. Inspired by work done by V. Piefort and A. Benjeddou, it...
The thermal stress in a layered plate is studied in this example. A plate consisting of two layers, a coating and a substrate layer is stress and strain free at 800 degrees C. The temperature of the plate is reduced to 150 degrees C and...
A capacitive pressure sensor is simulated. This model shows how to simulate the response of the pressure sensor to an applied pressure, and also how to analyze the effects of packing induced stresses on the sensor performance.
Piezoresistive pressure sensors were some of the first MEMS devices to be commercialized. Compared to capacitive pressure sensors, they are simpler to integrate with electronics, their response is more linear and they are inherently...
Silicon micromechanical resonators have long been used for designing sensors and are now becoming increasingly important as oscillators in the consumer electronics market. In this series of models, a surface micromachined MEMS resonator,...
This example shows how to set up a piezoelectric transducer problem following the work of Y. Kagawa and T. Yamabuchi. The composite piezoelectric ultrasonic transducer has a cylindrical geometry that consists of a piezoceramic layer, two...
