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MEMS Module

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Fluid-Structure InteractionFluid-Structure Interaction

This model demonstrates how to set up a fluid-structure interaction problem in COMSOL Multiphysics. It illustrates how fluid flow can deform solid structures and how to solve for the flow in a continuously deforming geometry. The...

Microresistor BeamMicroresistor Beam

This example illustrates the ability to couple thermal, electrical, and structural analysis in one model. This particular application moves a beam by passing a current through it; the current generates heat, and the temperature increase...

A Series of Biased Resonator Models A Series of Biased Resonator Models

Silicon micromechanical resonators have long been used for designing sensors and are now becoming increasingly important as oscillators in the consumer electronics market. In this series of models, a surface micromachined MEMS resonator,...

SAW Gas SensorSAW Gas Sensor

A surface acoustic wave (SAW) is an acoustic wave propagating along the surface of a solid material. Its amplitude decays rapidly, often exponentially, through the depth of the material. SAWs are utilized in many kinds of electronic...

Capacitive Pressure SensorCapacitive Pressure Sensor

A common way to detect membrane deformation is by measuring capacitance. The surface of the deforming membrane and the opposite side of one of the cavities are coated with metal. Thus they form a capacitor whose value depends on the...

Composite Piezoelectric TransducerComposite Piezoelectric Transducer

This example shows how to set up a piezoelectric transducer problem following the work of Y. Kagawa and T. Yamabuchi. The composite piezoelectric ultrasonic transducer has a cylindrical geometry that consists of a piezoceramic layer, two...

Thermal MicroactuatorThermal Microactuator

This tutorial model of a two-hot-arm thermal actuator couples three different physics phenomena: electric current conduction, heat conduction with heat generation, and structural stresses and strains due to thermal expansion. In this...

Piezoelectric Shear-Actuated BeamPiezoelectric Shear-Actuated Beam

The model performs a static analysis on a piezoelectric actuator based on the movement of a cantilever beam, using the Piezoelectric Devices predefined multiphysics interface. Inspired by work done by V. Piefort and A. Benjeddou, it...

Squeezed-Film Gas Damping in an AccelerometerSqueezed-Film Gas Damping in an Accelerometer

Squeezed-film gas damping is a critical aspect of many MEMS transducers and actuators. In accelerometers, for example, inertia produces a motion that the device detects. A typical structure connects a large proof mass to surrounding...

Thermal Expansion in a MEMS DeviceThermal Expansion in a MEMS Device

This model analyzes the thermal expansion in a MEMS device, such as a microgyroscope, where thermal expansion should be minimized. The device is made from the copper-beryllium alloy UNS C17500 and uses temperature-dependent material...


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