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MEMS Module

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Fluid-Structure InteractionFluid-Structure Interaction

This is a model exemplifying how fluid-structure interactions can be modeled using COMSOL Multiphysics. Viscous forces and the system’s pressure impose forces to the surface of a structure. The deformation in the soft structure is not...

Fluid-Structure Interaction with Two Fluid PhasesFluid-Structure Interaction with Two Fluid Phases

The following example demonstrates techniques for modeling a fluid-structure interaction containing two fluid phases in COMSOL Multiphysics. It illustrates how a heavier fluid can induce movement in an obstacle using the arbitrary...

Droplet Breakup in a T-junctionDroplet Breakup in a T-junction

Emulsions consist of small liquid droplets immersed in an immiscible liquid and widely occur in the production of food, cosmetics, fine chemicals, and pharmaceutical products. The quality of the product is typically dependent on the size...

Filling of a Capillary ChannelFilling of a Capillary Channel

This example studies a narrow vertical cylinder placed on top of a reservoir filled with water. Because of wall adhesion and surface tension at the air/water interface, water rises through the channel. Surface tension and wall adhesive...

Deformation of a Thermomechanical MicrovalveDeformation of a Thermomechanical Microvalve

Active microvalves are common components in microfluidic systems. In a thermomechanically actuated microvalve, an electric current generates movement by resistively heating the actuator structure, thereby causing mechanical stress and...

AC Electrokinetically Enhanced Surface ReactionsAC Electrokinetically Enhanced Surface Reactions

This model studies the use of AC electrokinetic forces to enhance the rate of transport of electrolytic reactants to a reaction surface on the wall of a microchannel. If transport was to be governed by flow alone, then the flow...

InkjetInkjet

This example demonstrates how to model the fluid flow from an inkjet, for instance, within an inkjet printer. An ink droplet is ejected through a nozzle and travels through air until it hits the target. A conservative level set method...

Microresistor BeamMicroresistor Beam

The example illustrates the ability to couple thermal, electrical, and structural analysis in the one model. This particular application displaces part of a beam by passing a current through it; the current generates heat, and the...

Thin Film BAW Composite ResonatorThin Film BAW Composite Resonator

Bulk Acoustic Wave (BAW) resonators can be used as narrow band filters in radio-frequency applications. The chief advantage compared with traditional ceramic electromagnetic resonators is that BAW resonators, thanks to the acoustic...

Cantilever BeamCantilever Beam

The elastic cantilever beam is one of the elementary structures used in MEMS designs. This model shows the bending of a cantilever beam under an applied electrostatic load. This is computed from the electric field that is solved in the...


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