This model simulates deposition of silicon onto a wafer using a 95/5 mixture of argon and silane. The plasma chemistry consists of 19 volumetric reactions, 8 surface reactions, 11 volumetric species and 3 surface species. The plasma is...
This model simulates electrical breakdown in an atmospheric pressure gas. Modeling dielectric barrier discharges in more than one dimension is possible, but the results can be difficult to interpret because of the amount of competing...
In this model, the exposed electrode is supplied with a transient voltage that, at its peak, causes the gas over the inserted electrode to ionize. The ionized gas, in the presence of the electric field produced by the electrode geometry,...
This model simulates a negative corona discharge occurring in between two co-axially fashioned conductors. The negative electric potential is applied to the inner conductor and the exterior conductor is grounded. The modeled discharge is...
This model simulates a plasma at medium pressure (2 torr) where the plasma is still not in local thermodynamic equilibrium. At low pressures the two temperatures are decoupled but as the pressure increases the temperatures tend towards...
The underlying physics of a capacitively coupled plasma is rather complicated, even for rather simple geometric configurations and plasma chemistries. This model benchmarks the Capacitively Coupled Plasma physics interface against many...
The GEC cell was introduced by NIST in order to provide a standardized platform for experimental and modeling studies of discharges in different laboratories. The plasma is sustained via inductive heating. The Reference Cell operates as...
3D plasma modeling is possible to do in COMSOL. A square coil is placed on top of a dielectric window and is electrically excited at 13.56MHz. A plasma is formed in the chamber beneath the dielectric window, which contains Argon gas at...
Electronegative plasmas exhibit different characteristics than electropositive discharges due to the presence of negative ions. This model simulates an inductively coupled plasma for a mixture of Argon (30%) and Oxygen (70%). The plasma...
The NIST GEC CCP reactor provides a platform for studying capacitively coupled plasmas. Even the simplest plasma models are quite involved so a 1D example helps in understanding the physics without excessive CPU time. The problem has...
