- Introduction
- COMSOL Multiphysics
- AC/DC Module
- Acoustics Module
- Batteries and Fuel Cells Module
- CAD Import Module and LiveLink™ Products
- CFD Module
- Chemical Reaction Engineering Module
- Electrodeposition Module
- Geomechanics Module
- Heat Transfer Module
- MEMS Module
- Microfluidics Module
- Plasma Module
- RF Module
- Structural Mechanics Module
- Subsurface Flow Module
- LiveLink™ for MATLAB®
- The COMSOL API
New Functionality in Version 4.2
Plasma Modeling
- Surface reactions of order greater than 1 are now supported.
- Unit support for reaction and surface reaction rate constants.
- User-defined electron energy distribution functions are now supported.
- Cross section data can be imported directly from the LXCAT database.
- Species transport and thermodynamic data are now included for the most common plasma processing gases.
- Mass flow rate boundary conditions, which allow specification of a flow rate in SCCM units.
- Vacuum pump boundary condition.
- Stabilization of reaction sources has been added for electrons and heavy species.
Note: The
stabilization is active by default, so models with very low plasma
densities might give slightly different results after re-solving in
version 4.2.
New Models
- Harmonic Content in a Dual Frequency CCP Reactor
- Dipolar Electron Cyclotron Resonance (ECR) Source
- Electrodeless Lamp
- Surface chemistry tutorial model
