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Adding a layer of Silicon Oxide on top of polysilicon

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Hello All,

I am new to Comsol, so this may be a dumb question. I am trying to make a thermal actuator using joule heating. I am trying to apply a layer of silicon dioxide on top of polysilicon. I do this by creating a work plane on top of the first layer, and then extruding that work plane. Then I apply the material to the domain that i just created by extruding the work plane. However, when ever I try this I get the following error:

Failed to find a solution. Segregated Step 1 Singular matrix.

There are 968 void equations (empty rows in matrix) for the variable comp1.V. at coordinates: (1,-5,1.5), (1,-5,2), (1,-3,2), (1,-3,1.5), (1,-2,1.5), ... and similarly for the degrees of freedom (empty columns in matrix). In Segregated Step 1: Returned solution is not converged. Not all parameter steps returned.

I'm not really sure what that error means. Additionally, if I set the material of the second layer to polysilicon instead of silicon dioxide (making both layers polysilicon), the error dissapears. I don't know why this is. The file is attached to this post.



0 Replies Last Post Nov 27, 2018, 3:10 a.m. EST
COMSOL Moderator

Hello George Alphonse

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