How to properly show displacement versus Force for a capacitive parallel plate with multiple electrodes?
Posted Jan 22, 2021, 10:15 AM EST Electrical, MEMS & Nanotechnology, Results & Visualization Version 5.4 0 Replies
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For my master thesis I want to determine through simulation the displacements due to applied forces. The sensor has 4 bottom and 4 top electrodes that do not complete align along with a bump on top which will be where the force is applied.
I used the capacitive pressure sensor model of COMSOL as guideline and tried to implement the component coupling average and integration. Ideally It would be possible to see the displacement of each of the top electrodes.
How can I plot the displacement of the electrodes versus the force? And which selections should I make in order to correctly visualise the displacement?
Hello Camilla Spaan
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