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Temperature Sensor Model
Posted May 8, 2012, 7:11 PM EDT AC/DC & Electromagnetics, MEMS & Nanotechnology, Heat Transfer & Phase Change, MEMS & Nanotechnology, Geometry, Materials, Structural Mechanics & Thermal Stresses Version 4.2a 6 Replies
I am designing a temperature sensor using an interdigitated capacitor. Using the electrostatics modules, I was successfully able to design the sensor with the starting capacitance value I wanted. However, regarding changing capacitance with temperature is where I run into problems. Thus far, I have been using the joule heating and thermal expansion module. Can anyone tell me if this is the correct module for my goal?
I have had some measure of success using it. However I find that when I remove the surrounding rectangle with air associated with it in the positive z direction and silicon in the negative z direction, the study completes, but with that rectangle, I get an error of singular matrix/solution does not converge and cannot complete the study. Why is this?
Also, without the surrounding rectangle, and without the proper dielectric in place, it seems that I cannot calculate capacitance correctly, and the values are all very small, approaching zero.
I have attached my model.
I would greatly appreciate help understanding this, thank you.