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Optimization of Thermal Properties Identification of Complex Thin Films Using MATLAB® and COMSOL Multiphysics

N. Semmar1 B. Wane1
1GREMI, UMR7344, CNRS-University of Orleans, Orléans Cedex 2, France

Thermal field of a Cu/Si thin film.

The importance of laser processing and thermal properties investigation of bulk materials and thin layers is still increasing. For thermal properties investigation many experimental systems were developed based on the photothermal effect. One of typical ways is to induce a rapid surface temperature increase is to use a pulsed laser beam, create a simplified model of this interaction, and compare the obtained results with experimental ones. A 2D transient heat conduction model was created in COMSOL Multiphysics in order to simulate the temperature change in a multilayer material irradiated by a KrF laser pulse (rapid photothermal process).

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