Back to MEMS and Nanotechnology  |  Previous paper  |  Next paper

Multiphysics FEM Simulations Approach for Development of a MEMS Heat Generator

G. S. Masi1 S. V. De Guido1 G. Montagna2 C. Martucci2 P. M. Congedo1 L. Vasanelli 1 M. G. Manera2 R. Rella2
1Department of Innovation Engineering, University of Salento, Lecce, Italy
2CNR-IMM, Lecce, Italy

CAD rendering of the device.

Introduction: Accurate fluid temperature control in microfluidic channels is a requirement for many lab-on-chip and micro-reactors.Thin films resistive metal heaters have proven to be the best choice for localizing heating applications with integrated microfluidic systems. A thin platinum layer has been chosen as the metal used to realize the meander because of its positive and linear temperature dependence. A theoretical analysis and computer simulation has been performed in order to understand the effect of heat transfer from the Ti/Pt meander to liquid and to study the mechanical behavior of materials caused of thermal stress. Good correlation between simulation and experimental data was obtained. We observed that the total displacement of PDMS cause by thermal stress doesn’t affect the device.

Share it on Social Media: