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Optimizing the Performance of MEMS Electrostatic Comb-Drive Actuator with different Flexure Springs

S. Gupta1 T. Pahwa1 R. Bansal1 V. Bansal1 B. Prasad1 D. Kumar1
1Electronic Science Department Kurukshetra University, Kurukshetra, Haryana

The variation of comb drive displacement for different flexures at low driving voltage.

A new design of electrostatic comb drive actuator is presented in this paper by using different spring designs and with different folded beam lengths. An increased displacement of lateral comb drive actuator will subsequently be accomplished with the same actuation voltage. Stress distribution over different spring designs are simulated by COMSOL 3.5a using a standard comb drive with 4 movable comb fingers and device displacement could reach up to maximum of 2.85µm at a constant driving voltage of 130V. With increase in flexure length from 220μm to 280μm, displacement and capacitance increases from 1.063μm to 2.85μm and 327pf to 352pf respectively at 130V.

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