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Mechanical Model of RF MEMS Capacitor Structures

R. Chatim1
1University of Kassel, Kassel, Germany

RF MEMS capacitor.

In order to design an RF MEMS based device, it is beneficial to have information concerning mechanical behavior. For model verification purpose, solution offered by simulation software equipped with predefined physics application is one valuable way to provide initial reference. To avoid unwanted particular total strain in RF MEMS structures, a compensation layer can be utilized. When the number of elements involved in the equations is huge and more resources consumed accordingly due to thin multilayers, an approach to reduce is useful, though accuracy is one aspect that has to be taken into account. Behavior of capacitor structure models shown throughout this study gives an opportunity to estimate the fabricated device and for which application it fits.

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